AMAT Applied Materials 0041-10824加热器

AMAT Applied Materials 0041-10824加热器

1.产 品 资 料 介 绍：

产品概述

AMAT 0041-10824 加热器是 Applied Materials 半导体工艺设备中的关键加热模块，主要用于控制工艺腔体或工艺板的温度。该加热器在沉积、刻蚀、离子注入等半导体制造工艺中起到核心作用，通过精确的热能传递保证工艺温度的稳定性和均匀性，从而提升产品良率和工艺一致性。

技术参数（典型特征）

• 类型：加热器 / Heater Module

• 功能：提供稳定、可控的热量，用于工艺腔体或工艺板加热

• 功率范围：根据工艺需求设计（通常几十瓦到几百瓦）

• 控制方式：与数字控制器或温控模块配合，实现闭环温度控制

• 接口形式：标准电气接口，与控制系统和加热器底板配合使用

• 工作环境：洁净室兼容，耐高温、耐化学腐蚀

• 兼容设备：Applied Materials CVD、PVD、Etch、Ion Implant 等半导体设备

应用场景

1. 工艺腔体加热

   • 提供稳定温度环境，确保薄膜沉积、刻蚀或离子注入过程的精确性。

2. 工艺板/晶圆加热

   • 对晶圆或工艺板进行均匀加热，提高工艺一致性和良率。

3. 温度闭环控制

   • 与数字控制器或温控模块配合，实时调节加热功率，实现精确温控。

4. 设备维护和更换

   • 模块化设计便于快速拆装，提高设备维护效率。

AMAT Applied Materials 0041-10824加热器 英文资料：

Product Overview

AMAT 0041-10824 heater is a key heating module in Applied Materials semiconductor process equipment, mainly used to control the temperature of process chambers or process boards. This heater plays a core role in semiconductor manufacturing processes such as deposition, etching, and ion implantation, ensuring the stability and uniformity of process temperature through precise heat transfer, thereby improving product yield and process consistency.

Technical parameters (typical features)

Type: Heater/Heater Module

Function: Provides stable and controllable heat for heating process chambers or process boards

Power range: Designed according to process requirements (usually tens to hundreds of watts)

Control method: Cooperate with digital controller or temperature control module to achieve closed-loop temperature control

Interface form: Standard electrical interface, used in conjunction with the control system and heater base plate

Work environment: cleanroom compatible, high temperature resistant, chemical resistant

Compatible devices: Applied Materials CVD, PVD, Etch, Ion Implant and other semiconductor devices

Application scenarios

Process chamber heating

Provide a stable temperature environment to ensure the accuracy of thin film deposition, etching, or ion implantation processes.

Process board/wafer heating

Uniform heating of wafers or process boards to improve process consistency and yield.

Temperature closed-loop control

Cooperate with digital controllers or temperature control modules to adjust heating power in real-time and achieve precise temperature control.

Equipment maintenance and replacement

Modular design facilitates quick disassembly and assembly, improving equipment maintenance efficiency.

AMAT Applied Materials 0041-10824加热器  产品展示      

 产品视频

3.其他产品

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HORNER ELECTRIC HE693SNP940接口模块

4.其他英文产品

NI SCXI-1162 Programmable power supply
KOKUSAI SMPCONT-A3B Main control circuit board
ALSTOM UT150-1 Control card

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218