Gasonics 853-4290-001负载锁电梯模块

Gasonics 853-4290-001负载锁电梯模块

1.产 品 资 料 介 绍：

一、产品概述

Gasonics 853-4290-001 是安装在 Gasonics 等离子处理设备中的一款 负载锁电梯模块（Loadlock Elevator Module），主要功能是控制腔体中样品托盘的升降动作，实现晶圆的装载与卸载。这种模块通常与真空系统、机械手、以及主处理腔体协调工作，是半导体自动化上下片系统中的关键部件。

二、技术作用

• 实现晶圆在真空负载锁腔体中的垂直升降动作；

• 控制晶圆从传输系统进入或退出主工艺腔体；

• 与气动或电机驱动系统配合，实现精确位置控制；

• 提供与设备控制器（PLC/HMI）之间的通信反馈（如到位信号）；

三、应用领域

1. 半导体晶圆制造

• 用于 Gasonics 等离子剥离设备（如 PEP、Aura 系列）中的负载锁结构，实现晶圆传送；

• 关键工艺阶段包括：光刻后剥胶、干法清洗、薄膜处理等；

• 常用于 150mm、200mm、甚至300mm 晶圆自动上下片系统中。

2. 化合物半导体/功率器件生产

• 在生产GaN、SiC等化合物半导体过程中，电梯模块用于保障高洁净度环境下的晶圆转移；

• 减少粒子污染，适应多种材料的精密处理。

3. 封装与测试前道工艺设备

• 在需进行表面改性或等离子活化处理的场合，负载锁电梯模块支持高通量上下片操作；

• 提高设备自动化水平，降低人工干预。

4. FPD/光电行业精密加工设备

• 在OLED/LCD或微纳器件加工设备中，也可应用类似升降模块配合真空处理单元。

英文资料：

1、 Product Overview

Gasonics 853-4290-001 is a Loadlock Elevator Module installed in Gasonics plasma processing equipment. Its main function is to control the lifting action of the sample tray in the chamber and achieve wafer loading and unloading. This type of module usually works in coordination with vacuum systems, robotic arms, and main processing chambers, and is a key component in semiconductor automation on-chip systems.

2、 Technical role

Realize the vertical lifting action of the wafer in the vacuum load lock chamber;

Control the entry or exit of wafers from the transfer system into or out of the main process chamber;

Cooperate with pneumatic or motor drive systems to achieve precise position control;

Provide communication feedback (such as in place signals) between the device controller (PLC/HMI);

3、 Application Fields

1. Semiconductor wafer manufacturing

Load lock structure used in Gasonics plasma stripping equipment (such as PEP, Aura series) to achieve wafer transfer;

The key process stages include: photoresist stripping after photolithography, dry cleaning, thin film processing, etc;

Commonly used in automatic wafer loading and unloading systems for 150mm, 200mm, and even 300mm wafers.

2. Production of compound semiconductors/power devices

Elevator modules are used to ensure wafer transfer in high cleanliness environments during the production of compound semiconductors such as GaN and SiC;

Reduce particle pollution and adapt to precision processing of various materials.

3. Pre packaging and testing process equipment

In situations where surface modification or plasma activation treatment is required, the load lock elevator module supports high-throughput loading and unloading operations;

Improve equipment automation level and reduce manual intervention.

4. Precision machining equipment for FPD/optoelectronic industry

In OLED/LCD or micro nano device processing equipment, similar lifting modules can also be used in conjunction with vacuum processing units.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218