AMAT 0100-20043印刷电路板

AMAT 0100-20043印刷电路板

1.产 品 资 料 介 绍：

AMAT 0100-20043 印刷电路板

产品概述

AMAT（Applied Materials）0100-20043 印刷电路板是一款用于半导体制造设备内部的关键电子模块，主要承担信号传输、处理和接口功能。它为设备内部传感器、执行器和控制器之间提供稳定的电子连接和信号处理能力，是设备正常运行和工艺精度控制的重要基础部件。

技术参数（典型方向，具体参数需参考原厂资料）

• 电路类型：多层印刷电路板，支持高密度布线

• 接口：兼容 AMAT 设备专用连接器和标准总线接口

• 信号功能：支持模拟信号和数字信号输入/输出

• 工作环境：适应高真空、洁净室和半导体工艺环境

• 可靠性：抗电磁干扰、耐高温、耐腐蚀

• 兼容性：适配 AMAT 多种沉积、刻蚀、离子注入设备

应用场景

1. 沉积工艺（CVD/PVD/ALD）

   • 作为控制器与传感器、执行器之间的信号桥梁，实现温度、气体流量、腔体压力等参数的监控和调节。

2. 刻蚀工艺

   • 用于射频功率、气体阀门和传感器信号传输，保证刻蚀速率和形貌精度。

3. 离子注入系统

   • 连接束流监测传感器和控制器，实现剂量和能量的精确控制。

4. 气体与真空控制系统

   • 与气体流量计、阀门和真空泵接口，实现腔体环境的稳定控制。

5. 工厂自动化和安全联锁

   • 在设备内部实现互锁信号传递，确保异常状态下设备安全停机。

6. 研发与实验平台

   • 用于实验室工艺验证平台，提供信号处理和数据采集功能，支持工艺开发和调试。

AMAT 0100-20043印刷电路板 英文资料：

AMAT 0100-20043 Printed Circuit Board

Product Overview

AMAT (Applied Materials) 0100-20043 printed circuit board is a key electronic module used inside semiconductor manufacturing equipment, mainly responsible for signal transmission, processing, and interface functions. It provides stable electronic connections and signal processing capabilities between internal sensors, actuators, and controllers of the equipment, and is an important foundational component for the normal operation of the equipment and process accuracy control.

Technical parameters (typical direction, specific parameters need to refer to the original factory information)

Circuit type: multi-layer printed circuit board, supporting high-density wiring

Interface: Compatible with AMAT device specific connectors and standard bus interfaces

Signal function: Supports analog and digital signal input/output

Work environment: Suitable for high vacuum, clean room, and semiconductor process environments

Reliability: Anti electromagnetic interference, high temperature resistance, corrosion resistance

Compatibility: Compatible with various AMAT deposition, etching, and ion implantation equipment

Application scenarios

Deposition process (CVD/PVD/ALD)

As a signal bridge between the controller, sensors, and actuators, it enables monitoring and adjustment of parameters such as temperature, gas flow rate, and chamber pressure.

etching process

Used for RF power, gas valve and sensor signal transmission, ensuring etching rate and morphology accuracy.

Ion implantation system

Connect the beam monitoring sensor and controller to achieve precise control of dose and energy.

Gas and vacuum control system

Interface with gas flow meters, valves, and vacuum pumps to achieve stable control of the chamber environment.

Factory automation and safety interlocking

Implement interlocking signal transmission within the device to ensure safe shutdown in case of abnormal conditions.

R&D and experimental platform

Used as a laboratory process validation platform, providing signal processing and data acquisition functions, supporting process development and debugging.

AMAT 0100-20043印刷电路板 产品展示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218