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AMAT 0100-00629 发电机配件 产品英文介绍
#AMAT 0100-00629 RF Generator Accessories Product Features
AMAT 0100-00629 belongs to the semiconductor machine RF generator matching component, used for etching and PVD equipment RF power supply unit.
1. RF power circuit supporting components ensure stable power output
2. Impedance matching circuit related components, adapted to process load changes
3. High frequency signal pathway to reduce RF power loss
4. Resistant to high-frequency and high current working conditions, with good heat control
5. Metal shielding structure to suppress radio frequency electromagnetic leakage
6. AMAT 0100-00629 is compatible with the original RF generator machine
7. Anti cavity process gas corrosion, resistant to plasma environment
8. The mechanical structure is sturdy and can withstand the vibration and impact of the cabinet
9. Accurate interface positioning, easy disassembly and alignment
10. Adaptation of cooling pathway to meet long-term high-power operation requirements
11. Can participate in automatic matching and adjustment of RF impedance
12. Reduce RF reflection power and protect the power supply host
13. The status of components affects the uniformity of process film formation and etching
14. Standardized replacement parts, convenient maintenance and replacement
15. Adapt production line for 24/7 uninterrupted operation
AMAT 0100-00629 is a key accessory for RF power supply, commonly used in semiconductor etching and thin film deposition process equipment.

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218


