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AMAT 0100-00629 发电机配件

发布时间:2026-08-17人气:

AMAT 0100-00629  发电机配件 

1.产 品 资 料 介 绍:

# AMAT 0100‑00629 射频发生器配件产品特点
AMAT 0100‑00629 属于半导体机台射频发生器配套组件,用于刻蚀、PVD 设备射频电源单元。
1、射频功率回路配套部件,保障功率输出稳定
2、阻抗匹配回路相关组件,适配工艺负载变化
3、高频信号通路,降低射频功率损耗
4、耐受高频大电流工况,发热控制良好
5、金属屏蔽结构,抑制射频电磁泄漏
6、AMAT 0100‑00629 适配原厂射频发生器整机
7、抗腔体工艺气体腐蚀,耐等离子体环境
8、机械结构牢固,耐受机柜振动冲击
9、接口定位精准,拆装对位简单
10、冷却通路适配,满足长时间大功率工作
11、可参与射频阻抗自动匹配调节
12、减少射频反射功率,保护电源主机
13、部件状态影响工艺成膜、刻蚀均匀性
14、标准化替换件,维修更换便捷
15、适配产线 7×24 小时不间断运行
AMAT 0100‑00629 为射频电源关键辅件,多用于半导体刻蚀、薄膜沉积工艺设备。

AMAT 0100-00629  发电机配件   产品英文介绍

#AMAT 0100-00629 RF Generator Accessories Product Features


AMAT 0100-00629 belongs to the semiconductor machine RF generator matching component, used for etching and PVD equipment RF power supply unit.

1. RF power circuit supporting components ensure stable power output

2. Impedance matching circuit related components, adapted to process load changes

3. High frequency signal pathway to reduce RF power loss

4. Resistant to high-frequency and high current working conditions, with good heat control

5. Metal shielding structure to suppress radio frequency electromagnetic leakage

6. AMAT 0100-00629 is compatible with the original RF generator machine

7. Anti cavity process gas corrosion, resistant to plasma environment

8. The mechanical structure is sturdy and can withstand the vibration and impact of the cabinet

9. Accurate interface positioning, easy disassembly and alignment

10. Adaptation of cooling pathway to meet long-term high-power operation requirements

11. Can participate in automatic matching and adjustment of RF impedance

12. Reduce RF reflection power and protect the power supply host

13. The status of components affects the uniformity of process film formation and etching

14. Standardized replacement parts, convenient maintenance and replacement

15. Adapt production line for 24/7 uninterrupted operation


AMAT 0100-00629 is a key accessory for RF power supply, commonly used in semiconductor etching and thin film deposition process equipment.

AMAT 0100-00629  发电机配件 产品展示

interlock_select_300mm_gen_rack_amat_0100-00629_0130-00629_rev_005_cdn-180-3.jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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