AMAT 0195-10582底盘控制箱

AMAT 0195-10582底盘控制箱

1.产 品 资 料 介 绍：

AMAT 0195-10582 底盘控制箱

产品概述

AMAT（Applied Materials）0195-10582 底盘控制箱是一款用于半导体制造设备的电气与电子集成单元，通常安装在设备底盘位置。它承担电源分配、控制信号管理、互锁保护等核心功能，为设备内部的子模块（如气体阀门、加热器、探测器、控制器等）提供稳定的运行环境和集中管理能力。底盘控制箱是确保设备长期可靠运行的重要基础设施。

技术参数（典型方向，具体数据需参考原厂资料）

• 系统类型：底盘集成电源与控制模块

• 电源输入：工业标准 AC 电源，多路输出

• 接口：数字/模拟 I/O 接口，兼容 AMAT 内部模块和上位机系统

• 安全功能：过压、过流、短路保护及互锁逻辑

• 适用环境：高洁净度、半导体工艺设备底盘安装

• 模块化设计：支持现场维护与升级扩展

应用场景

1. 沉积工艺（CVD/PVD/ALD）

   • 为腔体加热器、气体阀门、泵浦及探测器板提供稳定电源和控制信号

   • 协调子模块运行，保障薄膜沉积均匀性和工艺稳定性

2. 刻蚀工艺设备

   • 控制射频功率模块、气体流量、压力传感器等设备子模块

   • 实现刻蚀精度控制和工艺一致性

3. 离子注入系统

   • 提供离子源、扫描系统和束流监测模块的电源与信号接口

   • 保证注入剂量和均匀性

4. 气体与真空系统控制

   • 集中管理阀门、流量计、真空泵和压力传感器

   • 确保腔体环境稳定

5. 工厂自动化与安全互锁

   • 与上位监控系统接口，实现互锁、报警和安全保护功能

   • 避免设备异常运行造成损失

6. 研发与实验室工艺验证

   • 提供模块化电气控制平台，支持新工艺开发和实验调试

AMAT 0195-10582底盘控制箱  英文资料：

AMAT 0195-10582 Chassis Control Box

Product Overview

AMAT (Applied Materials) 0195-10582 Chassis Control Box is an electrical and electronic integrated unit used in semiconductor manufacturing equipment, typically installed in the equipment chassis position. It undertakes core functions such as power distribution, control signal management, and interlock protection, providing a stable operating environment and centralized management capability for sub modules inside the equipment (such as gas valves, heaters, detectors, controllers, etc.). The chassis control box is an important infrastructure to ensure the long-term reliable operation of equipment.

Technical parameters (typical direction, specific data should refer to the original factory information)

System type: Chassis integrated power and control module

Power input: Industrial standard AC power supply, multiple outputs

Interface: Digital/Analog I/O interface, compatible with AMAT internal modules and upper computer system

Safety functions: overvoltage, overcurrent, short-circuit protection and interlock logic

Applicable environment: high cleanliness, semiconductor process equipment chassis installation

Modular design: supports on-site maintenance and upgrade expansion

Application scenarios

Deposition process (CVD/PVD/ALD)

Provide stable power supply and control signals for chamber heaters, gas valves, pumps, and detector boards

Coordinate the operation of submodules to ensure the uniformity of thin film deposition and process stability

Etching process equipment

Control sub modules such as RF power module, gas flow, pressure sensor, etc

Realize etching accuracy control and process consistency

Ion implantation system

Provide power and signal interfaces for ion sources, scanning systems, and beam monitoring modules

Ensure injection dose and uniformity

Gas and vacuum system control

Centralized management of valves, flow meters, vacuum pumps, and pressure sensors

Ensure stable chamber environment

Factory automation and safety interlock

Interface with the upper monitoring system to achieve interlocking, alarm, and security protection functions

To avoid losses caused by abnormal operation of equipment

R&D and laboratory process validation

Provide a modular electrical control platform to support new process development and experimental debugging

AMAT 0195-10582底盘控制箱 产品展示      

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