AMAT 0190-18266气动锁紧组件

AMAT 0190-18266气动锁紧组件

1.产 品 资 料 介 绍：

AMAT 0190-18266 气动锁紧组件

产品概述

AMAT（Applied Materials）0190-18266 气动锁紧组件是一种用于半导体制造设备的机械定位与固定模块，通过气动驱动实现设备部件的快速锁紧或释放。它通常用于固定反应腔体、工艺模块或可移动托盘，保证工艺过程中部件的稳定性和精确定位，同时支持快速拆装和维护。

技术参数（典型方向，具体数据需参考原厂资料）

• 驱动方式：气动执行机构

• 锁紧力：满足设备部件固定所需的机械力

• 行程：根据模块设计，可实现完全锁紧和释放

• 接口：气动管路接口，兼容设备控制系统

• 安装方式：模块化，便于集成到设备底盘或腔体模块

• 环境适应性：适应半导体洁净室及高温、真空工艺环境

应用场景

1. 沉积工艺（CVD/PVD/ALD）

   • 锁紧腔体或工艺模块，保证薄膜沉积过程中工艺位置精度

   • 支持快速拆装以便设备维护或更换模块

2. 刻蚀工艺设备

   • 固定刻蚀腔体或工艺组件，确保刻蚀均匀性和工艺重复性

3. 离子注入系统

   • 锁紧扫描系统或束流模块，保持精确对准和稳定性

4. 设备维护与操作

   • 提供安全锁定功能，防止移动部件意外滑动或松动

   • 支持快速释放，便于现场维护和模块更换

5. 自动化工艺平台

   • 与气动控制系统结合，实现远程自动锁紧和释放，提高操作效率

AMAT  0190-18266气动锁紧组件 英文资料：

AMAT 0190-18266 Pneumatic Locking Component

Product Overview

AMAT (Applied Materials) 0190-1826 Pneumatic Locking Assembly is a mechanical positioning and fixing module used in semiconductor manufacturing equipment, which achieves rapid locking or releasing of equipment components through pneumatic drive. It is usually used to fix reaction chambers, process modules, or movable trays, ensuring the stability and precise positioning of components during the process, while supporting quick disassembly and maintenance.

Technical parameters (typical direction, specific data should refer to the original factory information)

Drive mode: Pneumatic actuator

Locking force: the mechanical force required to fix the equipment components

Journey: According to the module design, it can achieve complete locking and releasing

Interface: Pneumatic pipeline interface, compatible with equipment control system

Installation method: Modular, easy to integrate into equipment chassis or cavity modules

Environmental adaptability: Suitable for semiconductor cleanrooms and high-temperature, vacuum process environments

Application scenarios

Deposition process (CVD/PVD/ALD)

Lock the cavity or process module to ensure the accuracy of the process position during the thin film deposition process

Support quick disassembly and assembly for equipment maintenance or module replacement

Etching process equipment

Fixed etching chamber or process components to ensure etching uniformity and process repeatability

Ion implantation system

Lock the scanning system or beam module to maintain precise alignment and stability

Equipment maintenance and operation

Provide safety locking function to prevent accidental sliding or loosening of moving parts

Support quick release for easy on-site maintenance and module replacement

Automated process platform

Combined with pneumatic control system, achieve remote automatic locking and releasing, and improve operational efficiency

AMAT 0190-18266气动锁紧组件 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218