AMAT Applied Materials 0040-20100-01加热器底板

AMAT Applied Materials 0040-20100-01加热器底板

1.产 品 资 料 介 绍：

产品概述

AMAT 0040-20100-01 加热器底板是 Applied Materials 半导体工艺设备中的关键支撑与散热组件。它通常用于加热器模块的安装与固定，同时提供稳定的热传导和电气隔离。该底板确保加热器在工艺腔体或相关装置中能安全、均匀地传递热量，从而保证沉积、刻蚀或扩散工艺的温度精度和一致性。

技术参数（推断与行业常规）

• 类型：加热器底板（Heater Base Plate / Mounting Plate）

• 功能：机械支撑、热传导、电子隔离

• 材质：高温耐腐蚀金属或陶瓷复合材料

• 尺寸与安装：根据设备型号设计，适配特定加热器模块

• 耐温性能：可承受加热器工作温度范围，保证稳定性

• 工作环境：半导体洁净室，耐真空或低压环境

• 兼容设备：Applied Materials 多类沉积、刻蚀或热处理设备

应用场景

1. 加热器模块支撑

   • 固定加热器组件，保证其在工艺腔体中的位置稳定。

2. 热量传导与均匀化

   • 通过底板实现均匀热分布，减少局部过热或冷点，提高工艺一致性。

3. 电气隔离与安全

   • 隔离加热器电气部件，保障设备及晶圆安全。

4. 设备维护与更换

   • 便于拆装加热器模块，提高维护效率，减少停机时间。

AMAT Applied Materials 0040-20100-01加热器底板 英文资料：

Product Overview

The AMAT 0040-2010000-01 heater base plate is a key support and heat dissipation component in Applied Materials semiconductor process equipment. It is commonly used for the installation and fixation of heater modules, while providing stable heat conduction and electrical isolation. The bottom plate ensures that the heater can safely and uniformly transfer heat in the process chamber or related devices, thereby ensuring the temperature accuracy and consistency of deposition, etching, or diffusion processes.

Technical parameters (inference and industry norms)

Type: Heater Base Plate/Mounting Plate

Function: Mechanical support, thermal conduction, electronic isolation

Material: High temperature corrosion-resistant metal or ceramic composite material

Size and Installation: Designed according to the device model, compatible with specific heater modules

Temperature resistance performance: able to withstand the working temperature range of the heater, ensuring stability

Working environment: semiconductor clean room, resistant to vacuum or low pressure environment

Compatible devices: Applied Materials multi class deposition, etching, or heat treatment equipment

Application scenarios

Heater module support

Fix the heater component to ensure its stable position in the process chamber.

Heat conduction and homogenization

Realize uniform heat distribution through the bottom plate, reduce local overheating or cold spots, and improve process consistency.

Electrical isolation and safety

Isolate the electrical components of the heater to ensure equipment and wafer safety.

Equipment maintenance and replacement

Easy to disassemble and assemble heater modules, improve maintenance efficiency, and reduce downtime.

AMAT Applied Materials 0040-20100-01加热器底板 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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