AMAT Applied Materials 0190-35252气动室组件

AMAT Applied Materials 0190-35252气动室组件

1.产 品 资 料 介 绍：

产品概述

AMAT 0190-35252 气动室组件是 Applied Materials 半导体设备中用于气动控制的关键模块。该组件主要用于管理和调节工艺设备中气体的流动和压力，为阀门、执行器及其他气动子系统提供稳定的气压环境，确保半导体工艺设备的精准操作和安全运行。气动室组件是连接气源与工艺模块的核心接口，保证设备的气动系统稳定和工艺重复性。

技术参数（典型特征）

• 类型：气动室组件 / Pneumatic Chamber Assembly

• 功能：气压调节、气体分配、执行气动控制

• 接口类型：气体输入输出接口，兼容多路气体连接

• 控制方式：可与电磁阀或气动执行器配合，实现精确控制

• 工作环境：洁净室兼容，耐腐蚀、耐高压

• 适用设备：Applied Materials CVD、PVD、Etch、Ion Implant 等半导体工艺设备

• 气压范围：根据工艺需求设计，支持低压到高压气动控制

应用场景

1. 工艺气体流量和压力控制

   • 调节气体供应压力和流量，确保工艺模块按设定条件运行。

2. 气动阀门和执行器驱动

   • 为阀门、夹持器或其他气动装置提供稳定气源，实现精确动作。

3. 工艺稳定性保障

   • 保证气体供应稳定，提升沉积、刻蚀或离子注入工艺的重复性。

4. 设备维护和模块替换

   • 模块化设计便于拆装和更换，减少设备停机时间。

产品优势

• 气压控制精确：保证气动系统稳定运行，提升工艺一致性。

• 高可靠性：耐高压、耐腐蚀，适应半导体工艺环境。

• 模块化设计：便于安装、维护和升级，提高设备可用性。

• 兼容性强：支持与多种 AMAT 气动控制系统和工艺模块配合使用。

• 工艺安全性高：稳定气动环境，降低设备故障和操作风险。

AMAT Applied Materials 0190-35252气动室组件 英文资料：

Product Overview

AMAT 0190-35252 Pneumatic Chamber Component is a key module used for pneumatic control in Applied Materials semiconductor equipment. This component is mainly used to manage and regulate the flow and pressure of gases in process equipment, providing a stable pneumatic environment for valves, actuators, and other pneumatic subsystems, ensuring the precise operation and safe operation of semiconductor process equipment. The pneumatic chamber component is the core interface connecting the gas source and the process module, ensuring the stability of the pneumatic system and the repeatability of the process of the equipment.

Technical parameters (typical features)

Type: Pneumatic Chamber Assembly

Function: Air pressure regulation, gas distribution, pneumatic control execution

Interface type: Gas input/output interface, compatible with multiple gas connections

Control method: Can be combined with solenoid valves or pneumatic actuators to achieve precise control

Work environment: cleanroom compatible, corrosion-resistant, high-pressure resistant

Applicable equipment: Semiconductor process equipment such as Applied Materials CVD, PVD, Etch, Ion Implant, etc

Pressure range: Designed according to process requirements, supporting low-pressure to high-pressure pneumatic control

Application scenarios

Process gas flow and pressure control

Adjust the gas supply pressure and flow rate to ensure that the process module operates according to the set conditions.

Pneumatic valve and actuator drive

Provide a stable air source for valves, clamps, or other pneumatic devices to achieve precise movement.

Process stability guarantee

Ensure stable gas supply and improve the repeatability of deposition, etching, or ion implantation processes.

Equipment maintenance and module replacement

Modular design facilitates disassembly and replacement, reducing equipment downtime.

Product advantages

Accurate air pressure control: ensuring stable operation of the pneumatic system and improving process consistency.

High reliability: resistant to high voltage, corrosion, and suitable for semiconductor process environments.

Modular design: easy to install, maintain, and upgrade, improving equipment availability.

Strong compatibility: Supports compatibility with multiple AMAT pneumatic control systems and process modules.

High process safety: stabilize the pneumatic environment, reduce equipment failures and operational risks.

AMAT Applied Materials  0190-35252气动室组件 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218