AMAT Applied Materials 0050-30838焊接阀组
1.产 品 资 料 介 绍:
核心规格
产品特点
典型应用
AMAT Applied Materials 0050-30838焊接阀组 英文资料:
Applied Materials 0050-30838 welding valve assembly is a high-purity, corrosion-resistant gas distribution component designed specifically for semiconductor manufacturing equipment, used for precise control of process gas delivery and switching, ensuring process stability and repeatability.
Core specifications
Project specifications
Brand/Model Applied Materials 0050-30838
Applicable medium process gases (such as N ₂, Ar, O ₂, CF ₄, SF ₆, etc.)
Interface type VCR or Swagelok card sleeve connector, 1/4 ", 3/8" or 1/2 "(depending on the model)
Material body: 316L stainless steel; Sealing: Vespel, PTFE, UHP grade rubber
Working pressure: 0-200 psi (some can reach up to 300 psi)
Working temperature -20~150 ℃
Cleanliness level SEMI S2/S8 standard, suitable for high vacuum and ultra clean environments
Multi channel gas switching, flow regulation, pressure isolation
Installation method: panel type or integrated into gas cabinet
Product Features
High purity design: The all stainless steel structure combined with UHP sealing material effectively avoids gas pollution.
Corrosion resistance: Suitable for highly corrosive gas environments, ensuring long-term stable operation.
High precision control: Equipped with a precision regulating valve, it can achieve ppm level flow control.
Modular structure: supports online replacement, easy maintenance, and can flexibly expand the number of channels according to process requirements.
High reliability: Through rigorous pressure and leakage testing, it meets the requirements of 24 × 7 continuous operation.
Typical Applications
Gas distribution in semiconductor etching and deposition equipment
Process gas switching of ion implantation machine
Chemical transportation control of wafer cleaning equipment
Thin film deposition process for solar cell manufacturing
AMAT Applied Materials 0050-30838焊接阀组 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218