AMAT Applied Materials 0010-42744射频匹配器
1.产 品 资 料 介 绍：
核心功能
技术特点
典型应用
AMAT Applied Materials 0010-42744射频匹配器 英文资料：
AMAT Applied Materials 0010-42744 is an automatic RF matching device used to dynamically match the impedance of RF power sources and loads (such as reaction chambers and plasma sources) in semiconductor manufacturing equipment, achieving efficient power transmission in the 13.56MHz frequency band and reducing reflected power.
core functionality
Automatic tuning: Built in servo motor drives variable capacitors and inductors, real-time tracking of load impedance changes
Reflection power suppression: By using directional couplers and phase/amplitude detection, closed-loop adjustment minimizes the reflection power
Power range: Typical support for 0-1000W RF power, compatible with various process equipment
Frequency characteristics: Fixed operating at 13.56MHz (industrial standard plasma excitation frequency)
Communication interface: Provides RS-485, Ethernet or dedicated bus, supports integration with upper computer/controller
Technical Features
Project parameters/characteristics
Frequency 13.56MHz (fixed)
Power capacity 0-1000W (typical value)
Matching range 5-500 Ω (adjustable)
Typical tuning time<100ms (full range)
Interface form: N-type or SMA RF interface
Protection functions include over power, over reflection, and over heat protection
Mechanical specification standard 19 "rack or chassis installation
Typical Applications
Etching equipment: RF coupling cavity, electrode matching
PECVD deposition equipment: impedance matching of reaction chamber
Sputtering equipment: efficient transmission of target RF power
Ion implantation machine: RF source and matching network optimization
AMAT Applied Materials 0010-42744射频匹配器 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
