AMAT Applied Materials 5000-158控制器

AMAT Applied Materials 5000-158控制器

1.产 品 资 料 介 绍：

核心规格

功能特点

• 高精度控制：PID 算法结合高速采样，控制稳定，超调小。
• 灵活编程：多段升降温曲线，可实现复杂工艺循环。
• 多参数支持：不仅温湿度，还可接入气体流量、压力等线性信号。
• 远程监控：RS-485 接口可组网，上位机实时监控与记录。
• 安全可靠：看门狗保护、三级密码、过流过压保护，符合 SEMI S2 安全标准。

典型应用

• 300 mm 晶圆 PVD/CVD 腔体温控
• 工艺气体流量与压力稳定控制
• 电子材料环境温湿度控制
• 实验室与中试平台参数控制

AMAT Applied Materials 5000-158控制器  英文资料：

The AMAT Applied Materials 5000-158 controller is a multifunctional microprocessor PID process controller used for precise control of temperature, humidity, or linear parameters in semiconductor and material processes. It is compatible with platforms such as Centura and Endura and can operate independently or online.

Core specifications

Project specification remarks

Control type temperature, humidity or linear parameters such as gas flow rate, pressure

Control method: microprocessor PID closed-loop accuracy ± 0.1%

Channel configuration: Single/dual control modules can be mixed and matched

Programming function single/multi stage ramp/cooldown (maximum 9 stages)

Display 4 lines of 20 character VFD/LED real-time values and set values

Power supply 90-240 VAC, 50/60 Hz automatic adaptation

Communication interface RS-485, USB (optional) supports Modbus RTU

Output 2 channels of 4-20 mA isolation, 1 channel of automatic range can be set to hold/track

Alarm 4-channel (system, concentration, range/calibration, COP) can be equipped with dry contacts

Security level 3 password protection to prevent accidental operation

Installation method: Panel/rack/wall mounted optional NEMA 4X

Working temperature 0-60 ℃ Storage -40-85 ℃

Size 144 × 144 × 160 mm (panel type) approximately 1.2 kg

Features

High precision control: PID algorithm combined with high-speed sampling, stable control, and small overshoot.

Flexible programming: Multiple temperature rise and fall curves can be used to achieve complex process cycles.

Multi parameter support: not only temperature and humidity, but also linear signals such as gas flow rate and pressure can be connected.

Remote monitoring: RS-485 interface can be networked, and the upper computer can monitor and record in real time.

Safe and reliable: watchdog protection, three-level password, over-current and over-voltage protection, in compliance with SEMI S2 security standards.

Typical Applications

300mm wafer PVD/CVD chamber temperature control

Process gas flow and pressure stability control

Temperature and humidity control of electronic material environment

Laboratory and pilot platform parameter control

AMAT Applied Materials  5000-158控制器 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218