AMAT Applied Materials 4100-060G-M02压力传感器

AMAT Applied Materials 4100-060G-M02压力传感器

1.产 品 资 料 介 绍：

核心规格

功能特点

• 高精度测量：先进的硅压阻传感技术结合温度补偿，确保全量程范围内的稳定输出
• 宽工作温度范围：适用于半导体制造环境的高温与快速温变条件
• 高可靠性：全不锈钢结构、无内部 O 型圈设计，减少泄漏风险
• 强抗干扰能力：电气隔离与 EMI/RFI 防护，适用于复杂电磁环境
• 易于安装与维护：标准螺纹接口，可直接替换现有传感器

典型应用

• 真空系统压力监测
• 工艺气体流量控制中的压力测量
• 腔室压力闭环控制
• 液体输送系统的压力监控

AMAT Applied Materials 4100-060G-M02压力传感器 英文资料：

AMAT Applied Materials 4100-060G-M02 is an industrial grade pressure sensor designed specifically for semiconductor manufacturing equipment to accurately measure gas or liquid pressure, compatible with platforms such as Centura, Endura, P5000, etc.

Core specifications

Project specification remarks

Measurement range 0-60 PSI (approximately 0-414 kPa) gauge pressure measurement

Output signal 0-10 VDC linear proportional output

Pressure interface 1/4 "MNPT standard threaded connection

Supply voltage 10-30 VDC, typical 24 VDC

Material 316L stainless steel liquid contact parts corrosion-resistant

Suitable for industrial environments with working temperatures ranging from -40 ℃ to 85 ℃

Overload pressure 2 x range protection diaphragm

Accuracy ± 0.5% FSO (typical) laser tuning compensation

Protection level IP65 dustproof and waterproof

Electrical connection 6 ft cable with customizable length

Features

High precision measurement: Advanced silicon piezoresistive sensing technology combined with temperature compensation ensures stable output over the full range

Wide operating temperature range: suitable for high temperature and rapid temperature changes in semiconductor manufacturing environments

High reliability: All stainless steel structure, no internal O-ring design, reduces leakage risk

Strong anti-interference ability: electrical isolation and EMI/RFI protection, suitable for complex electromagnetic environments

Easy to install and maintain: standard threaded interface, can directly ｒｅｐｌａｃｅ existing sensors

Typical Applications

Vacuum system pressure monitoring

Pressure Measurement in Process Gas Flow Control

Closed loop control of chamber pressure

Pressure monitoring of liquid conveying system

AMAT Applied Materials 4100-060G-M02压力传感器 产品展示      

 产品视频

3.其他产品

AMAT 0190-00318控制器模块
ALSTOM AS111模拟输出模块
ALSTOM LC105 控制器模块

4.其他英文产品

AMAT 0100-09003 Embedded controller
AMAT 0100-02735 Ethernet interface module
AMAT 0100-01086 Remote control card

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218