AMAT Applied Materials 0190-07908载体板

AMAT Applied Materials 0190-07908载体板

1.产 品 资 料 介 绍：

核心规格

功能与价值

• 稳定承载：确保晶圆在高速传输与工艺中保持定位精度
• 耐高温耐磨：适应 400–1200℃工艺环境，寿命长
• 低吸附性：表面处理减少颗粒与化学残留，提升良率
• 可定制化：按客户设备与工艺要求调整结构与尺寸

选型与维护要点

1. 选型确认
   • 晶圆尺寸与厚度
   • 承载方式（边缘 / 中心 / ESC）
   • 接口类型与定位孔位
   • 工艺温度与气氛（氧化 / 还原 / 真空）
2. 维护建议
   • 每次使用前用高纯氮气吹扫并检测表面颗粒
   • 定期（100–200 批次）进行超声波清洗与表面检查
   • 高温工艺后检查热变形与裂纹

AMAT Applied Materials  0190-07908载体板 英文资料：

AMAT 0190-07908 is a specialized carrier board for semiconductor equipment from Applied Materials, used for fixing and transporting wafers/panels, adapting to process chambers, etching, thin film deposition, and other processes on platforms such as Endura, Centura, P5000, etc.

Core specifications

Project specifications/characteristics remarks

Material: High purity alumina (Al ₂ O3) or aluminum nitride (AlN), resistant to high temperatures and low thermal expansion

Size customized according to wafer size (such as 200mm, 300mm) with an accuracy of ± 0.05mm

Surface treatment, polishing/passivation/coating to reduce particle adsorption

Bearing method: Edge support/center support/electrostatic chuck (ESC) adaptation process requirements

Interface and Robot Arm/Transmission Arm Matching Standard SEMI E47

Weight approximately 0.8-1.5 kg (depending on size), lightweight design

Application wafer transfer, process support, vacuum environment with hard mask optional

Protection level ISO 4 cleanroom compatible with particle control

function and value

Stable Load Capacity: Ensure wafer positioning accuracy during high-speed transportation and process

High temperature and wear-resistant: suitable for process environments of 400-1200 ℃, with a long service life

Low adhesion: Surface treatment reduces particles and chemical residues, improving yield

Customizable: Adjust the structure and size according to customer equipment and process requirements

Selection and maintenance points

Selection confirmation

Wafer size and thickness

Bearing method (edge/center/ESC)

Interface type and positioning hole position

Process temperature and atmosphere (oxidation/reduction/vacuum)

Maintenance Recommendations

Before each use, blow and detect surface particles with high-purity nitrogen gas

Regular (100-200 batches) ultrasonic cleaning and surface inspection

Check for thermal deformation and cracks after high-temperature process

AMAT Applied Materials 0190-07908载体板 产品展示      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218