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AMAT Applied Materials 0680-01169加热器

发布时间:2025-10-11人气:
  • AMAT Applied Materials 0680-01169加热器
  • AMAT Applied Materials 0680-01169加热器
  • AMAT Applied Materials 0680-01169加热器

AMAT Applied Materials  0680-01169加热器

1.产 品 资 料 介 绍:

一、产品概述
AMAT Applied Materials 0680-01169 加热器是专为半导体制造设备设计的高精度温控组件,核心应用于晶圆处理、薄膜沉积、蚀刻等关键工艺环节,为设备腔体或工艺模块提供稳定、均匀的加热支持。在半导体生产过程中,工艺温度的精准控制直接影响晶圆的加工质量与成品率,该加热器通过高效的热转换结构与精准的温度响应设计,能够快速达到目标温度并维持稳定,有效避免因温度波动导致的工艺偏差,是保障半导体设备工艺稳定性的核心部件之一。
该加热器采用模块化设计,适配 AMAT 主流的半导体设备腔体结构,可与设备的温控系统无缝衔接,实现实时温度监测与动态调节。其外壳与加热元件均采用耐高腐蚀、耐高温的特种材料,能适应半导体设备内部复杂的工艺环境(如惰性气体氛围、轻微化学腐蚀环境等),确保长期稳定运行,降低设备维护频率与生产成本。
二、技术参数
AMAT Applied Materials 0680-01169 加热器基于半导体工艺的严苛需求设计,具体技术参数如下:
  • 产品型号:0680-01169,这是产品的专属标识,用于精准识别、采购与设备适配验证,确保用户能准确匹配所需部件。
  • 产品类型:半导体设备专用加热器,主要用于腔体或模块加热,区别于通用工业加热器,其设计更贴合半导体高精度工艺需求,能满足设备对温度控制的严苛标准。
  • 核心功能:涵盖工艺温度控制、腔体 / 模块加热以及温度稳定性维持,可为半导体工艺提供持续、稳定的热量输出,将工艺温度偏差严格控制在允许范围内,保障工艺质量。
  • 适用系统:适用于 Applied Materials 晶圆处理设备,例如 CVD(化学气相沉积)设备、PVD(物理气相沉积)设备的腔体以及蚀刻机等,限定了产品适配的 AMAT 设备系列,确保与设备温控系统、腔体结构的兼容性。

AMAT Applied Materials  0680-01169加热器 英文资料:

1、 Product Overview

AMAT Applied Materials 0680-01169 heater is a high-precision temperature control component designed specifically for semiconductor manufacturing equipment. Its core applications include wafer processing, thin film deposition, etching, and other key process links, providing stable and uniform heating support for equipment chambers or process modules. In the semiconductor production process, precise control of process temperature directly affects the processing quality and yield of wafers. This heater, through an efficient heat conversion structure and precise temperature response design, can quickly reach the target temperature and maintain stability, effectively avoiding process deviations caused by temperature fluctuations. It is one of the core components to ensure the process stability of semiconductor equipment.

The heater adopts a modular design, adapted to the mainstream semiconductor equipment cavity structure of AMAT, and can seamlessly connect with the temperature control system of the equipment to achieve real-time temperature monitoring and dynamic adjustment. The shell and heating element are made of special materials that are resistant to high corrosion and high temperature, which can adapt to the complex process environment inside semiconductor equipment (such as inert gas atmosphere, slight chemical corrosion environment, etc.), ensuring long-term stable operation and reducing equipment maintenance frequency and production costs.

2、 Technical parameters

The AMAT Applied Materials 0680-01169 heater is designed based on the stringent requirements of semiconductor processes, with specific technical parameters as follows:

Product model: 0680-01169, this is the exclusive identification of the product, used for precise identification, procurement, and equipment adaptation verification to ensure that users can accurately match the required components.

Product type: Semiconductor equipment specific heater, mainly used for heating chambers or modules. Different from general industrial heaters, its design is more in line with the high-precision process requirements of semiconductors and can meet the strict temperature control standards of equipment.

Core functions: Covering process temperature control, chamber/module heating, and temperature stability maintenance, it can provide continuous and stable heat output for semiconductor processes, strictly control process temperature deviation within the allowable range, and ensure process quality.

Applicable system: Suitable for Applied Materials wafer processing equipment, such as CVD (chemical vapor deposition) equipment, PVD (physical vapor deposition) equipment chambers, and etching machines. The AMAT equipment series for product adaptation is limited to ensure compatibility with equipment temperature control systems and chamber structures.

AMAT Applied Materials  0680-01169加热器 产品展示      

126-0404_amat_applied_0680-01169_cb_mag_thrm_3p_240vac_15a_50_6_asis_1.jpg

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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