AMAT Applied Materials 0680-01169加热器
1.产 品 资 料 介 绍:
- 产品型号:0680-01169,这是产品的专属标识,用于精准识别、采购与设备适配验证,确保用户能准确匹配所需部件。
- 产品类型:半导体设备专用加热器,主要用于腔体或模块加热,区别于通用工业加热器,其设计更贴合半导体高精度工艺需求,能满足设备对温度控制的严苛标准。
- 核心功能:涵盖工艺温度控制、腔体 / 模块加热以及温度稳定性维持,可为半导体工艺提供持续、稳定的热量输出,将工艺温度偏差严格控制在允许范围内,保障工艺质量。
- 适用系统:适用于 Applied Materials 晶圆处理设备,例如 CVD(化学气相沉积)设备、PVD(物理气相沉积)设备的腔体以及蚀刻机等,限定了产品适配的 AMAT 设备系列,确保与设备温控系统、腔体结构的兼容性。
AMAT Applied Materials 0680-01169加热器 英文资料:
1、 Product Overview
AMAT Applied Materials 0680-01169 heater is a high-precision temperature control component designed specifically for semiconductor manufacturing equipment. Its core applications include wafer processing, thin film deposition, etching, and other key process links, providing stable and uniform heating support for equipment chambers or process modules. In the semiconductor production process, precise control of process temperature directly affects the processing quality and yield of wafers. This heater, through an efficient heat conversion structure and precise temperature response design, can quickly reach the target temperature and maintain stability, effectively avoiding process deviations caused by temperature fluctuations. It is one of the core components to ensure the process stability of semiconductor equipment.
The heater adopts a modular design, adapted to the mainstream semiconductor equipment cavity structure of AMAT, and can seamlessly connect with the temperature control system of the equipment to achieve real-time temperature monitoring and dynamic adjustment. The shell and heating element are made of special materials that are resistant to high corrosion and high temperature, which can adapt to the complex process environment inside semiconductor equipment (such as inert gas atmosphere, slight chemical corrosion environment, etc.), ensuring long-term stable operation and reducing equipment maintenance frequency and production costs.
2、 Technical parameters
The AMAT Applied Materials 0680-01169 heater is designed based on the stringent requirements of semiconductor processes, with specific technical parameters as follows:
Product model: 0680-01169, this is the exclusive identification of the product, used for precise identification, procurement, and equipment adaptation verification to ensure that users can accurately match the required components.
Product type: Semiconductor equipment specific heater, mainly used for heating chambers or modules. Different from general industrial heaters, its design is more in line with the high-precision process requirements of semiconductors and can meet the strict temperature control standards of equipment.
Core functions: Covering process temperature control, chamber/module heating, and temperature stability maintenance, it can provide continuous and stable heat output for semiconductor processes, strictly control process temperature deviation within the allowable range, and ensure process quality.
Applicable system: Suitable for Applied Materials wafer processing equipment, such as CVD (chemical vapor deposition) equipment, PVD (physical vapor deposition) equipment chambers, and etching machines. The AMAT equipment series for product adaptation is limited to ensure compatibility with equipment temperature control systems and chamber structures.
AMAT Applied Materials 0680-01169加热器 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218