AMAT Applied Materials 0190-16537电源模块
1.产 品 资 料 介 绍:
- 功率规格:800W 高功率输出(直流模式),满足半导体蚀刻设备大负载供电需求
- 适配设备:专为 AMAT 300mm XP 系列蚀刻机设计,可精准匹配设备功率接口与控制逻辑
- 输入兼容性:参考同类 AMAT 电源特性,预计支持宽范围交流输入(如 85-264VAC),适配不同地区电网
- 稳压精度:采用开关电源技术,输出电压纹波低(参考同类模块≤1%),保障蚀刻工艺电流稳定
- 散热设计:可能内置高效散热片 + 智能温控风扇,快速导出 800W 负载产生的热量,避免过热降额
- 响应速度:针对蚀刻设备脉冲负载,具备毫秒级动态响应能力,减少电压波动对晶圆加工的影响
- 多重保护:内置过载、短路、过压保护功能,出现异常时自动切断输出,保护模块及下游设备
- 隔离特性:采用 Class Ⅱ 级电气隔离设计,输入与输出回路物理隔离,降低漏电风险
- 故障诊断:配备状态指示灯,可快速识别电源通断、过载等故障,简化检修流程
- 环境耐受:工作温度范围预计达 0-75℃,适配半导体洁净车间温湿度环境
- 认证标准:通过 UL(美国)、CE(欧盟)安全认证,符合 RoHS 环保要求,适配国际市场
- 结构耐用:金属外壳封装,抗振动性能强,适配半导体车间设备运行时的机械振动环境
AMAT Applied Materials 0190-16537电源模块 英文资料:
1. Power and adaptability (0190-16537 power module)
Power specification: 800W high-power output (DC mode), meeting the high load power supply requirements of semiconductor etching equipment
Adaptation equipment: specially designed for AMAT 300mm XP series etching machines, capable of accurately matching device power interfaces and control logic
Input compatibility: Referring to the characteristics of similar AMAT power supplies, it is expected to support a wide range of AC inputs (such as 85-264VAC) and adapt to different regional power grids
2. Performance and stability (0190-16537 power module)
Voltage stabilization accuracy: Using switching power supply technology, the output voltage ripple is low (reference to similar modules ≤ 1%), ensuring stable etching process current
Heat dissipation design: It may have built-in high-efficiency heat sinks and intelligent temperature controlled fans to quickly dissipate the heat generated by an 800W load, avoiding overheating and derating
Response speed: With millisecond level dynamic response capability for pulse loads in etching equipment, it reduces the impact of voltage fluctuations on wafer processing
3. Safety and Protection (0190-16537 Power Module)
Multiple protection: Built in overload, short circuit, and overvoltage protection functions, automatically cutting off output in case of abnormalities, protecting modules and downstream equipment
Isolation characteristics: Adopting Class II electrical isolation design, the input and output circuits are physically isolated to reduce the risk of leakage
Fault diagnosis: Equipped with status indicator lights, it can quickly identify faults such as power on/off and overload, simplifying the maintenance process
4. Compliance and Durability (0190-16537 Power Module)
Environmental tolerance: The expected working temperature range is 0-75 ℃, suitable for the temperature and humidity environment of semiconductor clean rooms
Certification standards: UL (USA) and CE (EU) safety certifications have been passed, meeting RoHS environmental requirements and adapting to the international market
Durable structure: metal shell packaging, strong anti vibration performance, suitable for the mechanical vibration environment during the operation of semiconductor workshop equipment
AMAT Applied Materials 0190-16537电源模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218