AMAT Applied Materials 600369自动温度控制器
1.产 品 资 料 介 绍：
- 设备适配：匹配 AMAT 半导体工艺设备（如 CVD 沉积腔室、蚀刻机加热模块），用于晶圆加工中腔室壁、反应托盘、加热管等部件的温度精准控制，适配 300mm 晶圆制造全流程。
- 工艺兼容：聚焦高洁净、高温工艺场景，兼容薄膜沉积（如金属、介电质沉积）、晶圆退火等需稳定温控的工序，可与 AMAT 设备主控系统联动，实现工艺温度时序化调节。
- 核心功能：实现多区域温度的实时监测、自动调节与异常报警，保障工艺温度稳定性，避免温度波动导致的晶圆薄膜厚度不均、蚀刻速率异常等问题。
- 控温精度：温度控制范围 - 50-500℃，控温误差≤±0.1℃（200-400℃核心区间），温度分辨率 0.01℃，适配 3x 纳米制程对工艺温度的严苛要求。
- 响应性能：温度采样频率≥10Hz，加热 / 制冷调节响应时间≤1s，支持 PID 自整定算法，可自动补偿环境温度、负载变化对控温的影响，连续运行无温漂。
- 输出能力：支持多路模拟量输出（4-20mA），可驱动加热棒、制冷器等执行元件，单路最大输出功率≤5kW，适配不同加热模块的功率需求。
- 防护设计：外壳采用工业级阻燃金属材质，防护等级 IP65，防粉尘、防车间清洁泼溅；内部电路具备防静电（ESD）、防电磁干扰（EMI）设计，通过 EN 55032 Class B 电磁兼容测试。
- 安装适配：紧凑型结构（尺寸约 180×100×60mm），支持面板嵌入式 / 导轨式安装，适配设备控制柜内有限空间；接线端子带防呆标识与螺丝锁固，避免振动导致的接线松动。
- 操作便利：配备 2.4 英寸 LCD 显示屏，支持中文 / 英文界面切换，可直观显示实时温度、设定值、报警信息；自带物理按键，支持本地参数设置，也可通过 RS-485 接口远程调控。
AMAT Applied Materials 600369自动温度控制器 英文资料：
1. Adaptation scenarios and functions (600369)
Equipment adaptation: Matched with AMAT semiconductor process equipment (such as CVD deposition chambers, etching machine heating modules), used for precise temperature control of chamber walls, reaction trays, heating tubes, and other components in wafer processing, suitable for the entire process of 300mm wafer manufacturing.
Process compatibility: Focusing on high cleanliness and high temperature process scenarios, it is compatible with processes that require stable temperature control such as thin film deposition (such as metal and dielectric deposition) and wafer annealing. It can be linked with the AMAT equipment main control system to achieve sequential adjustment of process temperature.
Core function: Real time monitoring, automatic adjustment, and abnormal alarm of temperature in multiple areas, ensuring process temperature stability and avoiding problems such as uneven thickness of wafer thin films and abnormal etching rates caused by temperature fluctuations.
2. Accuracy and Performance (600369)
Temperature control accuracy: Temperature control range -50-500 ℃, temperature control error ≤ ± 0.1 ℃ (core range of 200-400 ℃), temperature resolution 0.01 ℃, suitable for the strict temperature requirements of 3x nanometer processes.
Response performance: Temperature sampling frequency ≥ 10Hz, heating/cooling adjustment response time ≤ 1s, supports PID self-tuning algorithm, can automatically compensate for the impact of environmental temperature and load changes on temperature control, continuous operation without temperature drift.
Output capability: Supports multi-channel analog output (4-20mA), can drive actuators such as heating rods and refrigerators, with a maximum output power of ≤ 5kW per channel, suitable for the power requirements of different heating modules.
3. Structure and Protection (600369)
Protection design: The shell is made of industrial grade flame-retardant metal material, with a protection level of IP65, and is resistant to dust and workshop cleaning splashes; The internal circuit is designed with anti-static (ESD) and electromagnetic interference (EMI) protection, and has passed the EN 55032 Class B electromagnetic compatibility test.
Installation adaptation: Compact structure (size approximately 180 × 100 × 60mm), supporting panel embedded/rail mounted installation, suitable for limited space inside equipment control cabinets; The wiring terminals are equipped with anti misoperation signs and screw locks to prevent loose wiring caused by vibration.
Easy to operate: equipped with a 2.4-inch LCD display screen, supporting Chinese/English interface switching, can intuitively display real-time temperature, set values, and alarm information; Comes with physical buttons, supports local parameter settings, and can also be remotely controlled through RS-485 interface.
AMAT Applied Materials 600369自动温度控制器 产品展示
产品视频
3.其他产品
NI PXIE-5672信号发生器
LAM 839-019090-611静电夹
AMAT 0195-14329温度控制器
4.其他英文产品
ABB OCAH 940181103 logic card
OCAHG 492838402 DCS system card
PP825 3BSE042240R1 Touch screen
| PFTL101B | AMAT 0100-90139 | PFRL101D 5KN |
| PFRL101D | AMAT 0100-00642 | PFTL 101BE-2.0KN |
| PFRL101C | AMAT 0100-09292 | PFTL 201CE-50.0KN |
| PFRL101B | AMAT 0100-00069 | PFTL 101BER-5.0KN |
| PFRL101A | AMAT 0100-35170 | PFTL 101AER-0.5 |
| PFEL113 | AMAT 0100-90861 | PFTL101A-1.0KN 3BSE004166R1 1.0KN |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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