Gasonics 15132-01机器人晶圆移动器
1.产 品 资 料 介 绍：
产品概述：
Gasonics 15132-01 是一款用于半导体制造设备中的机器人晶圆移动器，属于三轴机械臂（Z-Bot）类型。它主要负责自动搬运晶圆，实现晶圆在设备内部各工位之间的精准传送，提升生产线的自动化水平和加工效率。
技术参数（典型）：
运动轴数：三轴（X、Y、Z 方向）
搬运对象：晶圆、载具等半导体工艺材料
控制方式：机械驱动，配合设备主控系统协调运动
适配设备：Gasonics Aura 系列、L-3500、L-3510 等半导体工艺设备
结构形式：工业级机械臂，符合洁净室使用标准
应用场景：
晶圆自动搬运与定位
半导体清洗、蚀刻、沉积等工艺流程中的晶圆传送
自动化生产线内物料的精准转移
替代人工搬运，提高生产稳定性和效率
产品优势：
高精度定位与运动控制
结构紧凑，适合集成于多种半导体设备中
适应洁净室环境设计
可作为设备维护和升级的重要备件
英文资料：
Product Overview:
Gasonics 15132-01 is a robotic wafer mover used in semiconductor manufacturing equipment, belonging to the three-axis robotic arm (Z-Bot) type. It is mainly responsible for automatic wafer handling, achieving precise transfer of wafers between various workstations within the equipment, and improving the automation level and processing efficiency of the production line.
Technical parameters (typical):
Number of Motion Axes: Three Axes (X, Y, Z Direction)
Transport objects: semiconductor process materials such as wafers and carriers
Control mode: mechanical drive, coordinated with the main control system of the equipment to coordinate movement
Compatible equipment: Gasonics Aura series, L-3500, L-3510 and other semiconductor process equipment
Structural form: Industrial grade robotic arm, compliant with cleanroom usage standards
Application scenarios:
Automatic wafer handling and positioning
Wafer transfer in semiconductor cleaning, etching, deposition and other process flows
Accurate transfer of materials within automated production lines
ｒｅｐｌａｃｅ manual handling to improve production stability and efficiency
Product advantages:
High precision positioning and motion control
Compact structure, suitable for integration into various semiconductor devices
Adapt to cleanroom environment design
Can serve as important spare parts for equipment maintenance and upgrades
2.产 品 展 示
3.其他产品
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| PMB31B-10214-03 | NKLS111 | M21NRXC-LSS-NS-03 |
| PMB31B-10214-02 | NRI002 | 57160001-DL DSDI 302 |
| PMB31B-10214-01 | AMAT 0100-03267 | 57160001-BN DSTD 151 |
| PMB31B-10214-00 | NTAI05 | M22NRXC-LDN-M1-00 |
| PMB31B-10201-03 | AMAT 0100-76085 | PFVL141R |
| PMB31B-10201-02 | INIIT02 | 57120001-NY DSTA 121 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
