Gasonics AWD-D-1-0-012微波电源
1.产 品 资 料 介 绍：
产品概述：
Gasonics AWD-D-1-0-012 是一款用于半导体设备的微波电源模块，主要提供稳定的微波能量，支持等离子体清洗、去胶等工艺。
技术参数（典型）：
功率输出：具体参数视设备配置而定
频率范围：符合半导体等离子工艺需求
电气接口：标准工业接口，适配Gasonics设备
工作环境：洁净室级别，半导体制造环境
应用场景：
等离子体激发，用于晶圆处理
半导体设备维护和替换
自动化工艺流程中微波能量供应
产品优势：
输出稳定，支持高效工艺
良好兼容性，便于设备维护
可靠性高，适应半导体环境
英文资料：
Product Overview:
Gasonics AWD-D-1-0-012 is a microwave power module used in semiconductor equipment, mainly providing stable microwave energy and supporting processes such as plasma cleaning and debonding.
Technical parameters (typical):
Power output: Specific parameters depend on device configuration
Frequency range: meets the requirements of semiconductor plasma technology
Electrical interface: Standard industrial interface, compatible with Gasonics equipment
Working environment: cleanroom level, semiconductor manufacturing environment
Application scenarios:
Plasma excitation for wafer processing
Maintenance and replacement of semiconductor equipment
Microwave energy supply in automated process flow
Product advantages:
Stable output, supporting efficient processes
Good compatibility, easy to maintain equipment
High reliability, suitable for semiconductor environment
2.产 品 展 示
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| PMB31B-00101-03 | 07EB200 | N32HLHJ-LNK-NS-00 |
| PMB31B-00101-02 | NPSI02 | 57120001-HE DSAI 309 |
| PMB31B-00101-01 | NKAS11 | P21NSXS-LSS-NS-05 |
| PMB31B-00101-00 | AMAT 0100-91085 | PFTL101AER 2.0KN 3BSE023012R1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
