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Gasonics A94-062-01机器人套装

发布时间:2025-07-24人气:
  • Gasonics A94-062-01机器人套装
  • Gasonics A94-062-01机器人套装
  • Gasonics A94-062-01机器人套装

Gasonics A94-062-01机器人套装

1.产 品 资 料 介 绍:

产品名称

Gasonics A94-062-01 机器人套装


产品概述

Gasonics A94-062-01 是一款用于半导体等离子体处理设备的机器人套装,包含机械臂(Theta Arm)、控制电路板(Theta Board)、末端执行器及连接电缆。该套装主要用于晶圆的自动搬运和处理,支持设备的高效自动化运行。


应用领域

  1. 等离子体清洗与剥离设备
    用于 Gasonics 等离子体设备中,自动完成晶圆的搬运,提高工艺自动化水平和生产效率。

  2. 设备维护与升级
    作为关键替换组件,用于替换老化或损坏的机器人单元,保障设备持续稳定运行。

  3. 研发与实验室应用
    支持实验环境中的等离子体工艺研究,提供精确的晶圆搬运功能。


产品优势

  • 机械臂运动稳定,确保精准搬运

  • 组件兼容性强,适配多种 Gasonics 设备

  • 结构紧凑,便于设备内部安装

  • 采用高品质元件,可靠性高,维护方便

英文资料:

product name

Gasonics A94-062-01 Robot Kit


product overview

Gasonics A94-062-01 is a robot kit for semiconductor plasma processing equipment, which includes a mechanical arm (Theta Arm), a control circuit board (Theta Board), end effectors, and connecting cables. This set is mainly used for automatic handling and processing of wafers, supporting efficient and automated operation of equipment.


application area 

Plasma cleaning and stripping equipment

Used in Gasonics plasma equipment to automatically complete wafer handling, improve process automation level and production efficiency.


Equipment maintenance and upgrade

As a key replacement component, it is used to replace aging or damaged robot units, ensuring the continuous and stable operation of the equipment.


Research and laboratory applications

Support plasma process research in experimental environments and provide precise wafer handling capabilities.


Product advantages

Stable movement of the robotic arm ensures precise handling


Strong component compatibility, compatible with various Gasonics devices


Compact structure, easy to install inside the equipment


Using high-quality components, high reliability, and easy maintenance

2.产      品      展      示      

gasonics_a94-062-01_hine_design_853-2493-001_theta_arm_robot_set_new_surplus_1.jpg

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RADISYS 061-05927-0031 adapter module

KOLLMORGEN S70602-NANANA servo/driver

ASEA ES1530b module card board

PC843-XYZ-T6SC6140-0FE01MC-GAIH22
PC843-XYZ-N6SC6500-0UC01MC-PDOX02
PC843-XYZ-F6SC6100-0GA00NTDI01   
PC843-XYZ-A6SC6120-0FE00NKTT01-3 
PC843-001-T6SC6101-2B-ZHESG447433R0001 70BV05A-ES
PC843-001-N6SC6100-0GA11HESG446933R0002 70AB02B-E

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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