Gasonics A93-021-05/D磁控波导模块
1.产 品 资 料 介 绍:
产品概述
该磁控波导模块用于高效传输微波能量,配合磁控管产生稳定的等离子体,广泛应用于微波等离子体处理系统中。
应用领域
半导体制造
等离子体刻蚀工艺中的微波能量传输
化学气相沉积(CVD)薄膜生长过程
材料表面处理
表面改性、清洗和活化工艺
微波辅助涂层沉积
科研及工业微波等离子体设备
各类实验室和工业级微波等离子体反应器
用于开发和优化等离子体工艺
总结
Gasonics A93-021-05/D 磁控波导模块是半导体和材料处理领域微波等离子体系统中的关键部件,保障微波能量高效传输和工艺稳定性。
英文资料:
product overview
This magnetron waveguide module is used for efficient transmission of microwave energy and, in conjunction with a magnetron, generates stable plasma. It is widely used in microwave plasma processing systems.
application area
Semiconductor Manufacturing
Microwave energy transfer in plasma etching process
Chemical Vapor Deposition (CVD) Thin Film Growth Process
Material surface treatment
Surface modification, cleaning, and activation processes
Microwave assisted coating deposition
Research and industrial microwave plasma equipment
Various laboratory and industrial grade microwave plasma reactors
Used for developing and optimizing plasma processes
summarize
Gasonics A93-021-05/D magnetron waveguide module is a key component in microwave plasma systems in the semiconductor and material processing fields, ensuring efficient transmission of microwave energy and process stability.
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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