Gasonics 04630-003索引器
1.产 品 资 料 介 绍：
Gasonics 04630-003 索引器（Indexer） 是用于 Gasonics 等离子体剥离系统中的晶圆输送装置或部件，通常担任晶圆在处理流程中精准定位、传送、装卸的功能，在自动化等离子清洗设备中是不可或缺的运动控制模块之一。
一、产品概述
Gasonics 04630-003 索引器是安装在等离子体剥离机内部或晶圆搬运子系统中的机械执行组件，负责晶圆在处理流程中的“步进式”位置转换，即在多个处理工位之间精确移动晶圆。例如，在前段上片位、中间反应腔、后段下片位之间进行定位输送。
二、技术功能
晶圆定位：自动将晶圆对准反应腔中心，提高处理均匀性
步进驱动：通过精密马达或气动机构完成晶圆的分步移动
与系统同步：与Gasonics主控制器通讯，实现工艺流程联动
位置反馈：内建传感器（如光电或接近开关）反馈当前工位状态
三、应用领域
04630-003 索引器通常用于以下Gasonics系统中（型号可能为Aura、L3510、PEP系列等）：
晶圆加载/卸载流程
从FOUP、盒子或卡匣中自动取片、移片、放片
等离子体剥离反应前后的晶圆转移
将晶圆准确送入腔体中心，并在处理后送出
多腔体系统中的晶圆分发/集成控制
在多工艺腔体之间切换晶圆位置，支持流水线式工艺
英文资料：
The Gasonics 04630-003 indexer is a wafer transport device or component used in Gasonics plasma stripping systems, typically responsible for precise positioning, transportation, loading and unloading of wafers in the processing flow. It is an indispensable motion control module in automated plasma cleaning equipment.
1、 Product Overview
The Gasonics 04630-003 indexer is a mechanical execution component installed inside the plasma stripping machine or wafer handling subsystem, responsible for the "step-by-step" position conversion of wafers in the processing flow, that is, precise movement of wafers between multiple processing stations. For example, positioning and conveying between the upper wafer position in the front section, the middle reaction chamber, and the lower wafer position in the rear section.
2、 Technical functions
Wafer positioning: Automatically align the wafer with the center of the reaction chamber to improve processing uniformity
Step by step drive: Complete the step-by-step movement of wafers through precision motors or pneumatic mechanisms
Synchronize with the system: Communicate with the Gasonics main controller to achieve process linkage
Position feedback: Built in sensors (such as photoelectric or proximity switches) provide feedback on the current workstation status
3、 Application Fields
The 04630-003 indexer is commonly used in the following Gasonics systems (models may be Aura, L3510, PEP series, etc.):
Wafer loading/unloading process
Automatically pick up, move, and place pieces from FOUPs, boxes, or cartridges
Wafer transfer before and after plasma stripping reaction
Accurately feed the wafer into the center of the cavity and send it out after processing
Wafer distribution/integrated control in multi cavity systems
Switching wafer positions between multiple process chambers, supporting assembly line processes
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-66253 Communication Module
CI860K01 3BSE032444R1 power module
CI871AK01 3BSE092693R1 interface module
| IC3600SBMA1A | 531X207LCSAFG1 | IC3600SOTH1 |
| IC3600SBMA1 | 531X207LCSAEH1 | IC3600EPZU1C |
| IC3600SASA1 | 531X207LCSAEG1 | IC3600EPZU1B |
| IC3600SAHD1A | 531X207LCSACG1 | IC3600EPZU1A |
| IC3600SAHD1 | 531X199SPTADG1 | IC3600EPZU1 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
