Gasonics 16254-02操作界面面板

Gasonics 16254-02操作界面面板

1.产 品 资 料 介 绍：

Gasonics 16254-02 操作界面面板 是 Gasonics 等离子体剥离系统中的一个人机交互模块（HMI），用于控制和监视设备运行状态，提供操作指令输入、工艺参数设置以及系统报警显示等功能。

一、产品概述

Gasonics 16254-02 操作界面面板是安装于 Gasonics 系统设备控制台上的主要控制界面，通常为面板式或嵌入式结构，配备按键、旋钮、显示屏（如LCD/VFD等），是操作者与设备之间的桥梁。该面板可能属于 Gasonics Aura、L3510 或其他早期剥离机型的控制系统。

二、技术特性

• 型号识别：16254-02 为部件号，可能代表某一特定版本的标准控制面板

• 接口形式：可能通过并口、串口或专用通信协议与主控制器连接

• 操作功能：

  • 设备启动/停止

  • 真空泵、RF电源控制

  • 工艺时间、气体流量等设定参数输入

  • 状态指示灯/报警信息显示

三、应用场景

该面板适用于以下Gasonics设备中的操作控制任务：

1. 等离子体剥离系统（如Gasonics Aura 2000, L3510, PEP系列）

   • 进行光刻胶去除、腔体清洗等操作的启动与监控

2. 生产线交互界面

   • 与前端上料系统或后端测试系统交互，设置流程参数

3. 维护与诊断模式下使用

   • 显示设备错误代码、系统状态信息，协助技术人员排查故障

英文资料：

The Gasonics 16254-02 operation interface panel is a human-machine interaction module (HMI) in the Gasonics plasma stripping system, used to control and monitor equipment operation status, provide operation command input, process parameter settings, and system alarm display functions.

1、 Product Overview

The Gasonics 16254-02 operator interface panel is the main control interface installed on the Gasonics system equipment console, typically a panel or embedded structure, equipped with buttons, knobs, display screens (such as LCD/VFD, etc.), serving as a bridge between the operator and the equipment. This panel may belong to the control system of Gasonics Aura, L3510, or other early stripping models.

2、 Technical characteristics

Model identification: 16254-02 is the part number, which may represent a specific version of the standard control panel

Interface form: It may be connected to the main controller through parallel port, serial port, or dedicated communication protocol

Operation function:

Device start/stop

Vacuum pump, RF power control

Input of setting parameters such as process time and gas flow rate

Status indicator light/alarm information display

3、 Application scenarios

This panel is suitable for operational control tasks in the following Gasonics devices:

Plasma stripping system (such as Gasonics Aura 2000, L3510, PEP series)

Initiate and monitor operations such as photoresist removal and cavity cleaning

Production line interactive interface

Interact with the front-end feeding system or back-end testing system to set process parameters

Used in maintenance and diagnostic mode

Display device error codes and system status information to assist technicians in troubleshooting

2.产      品      展      示      

3.其他产品

BENTLY 3500/45 176449-04位置监测器

HONEYWELL 51107403-100 输入输出模块

 002-1-23158-10 印刷电路板

4.其他英文产品

A-B 1769-OF8C current module

ABB XXD129A01 Card Module Controller

AMAT 0190-66253 Communication Module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218