Gasonics 73-0068电梯对准工具
1.产 品 资 料 介 绍：
英文资料：
Gasonics 73-0068 Elevator Alignment Tool
Brief introduction
Name: Elevator Alignment Tool
Part number: 73-0068
Applicable models: Gasonics plasma processing equipment (such as A-2000, Aura, PEP series)
Purpose: Used for mechanical alignment and position correction of elevator platforms in load lock chambers or process chambers
Equipment Type: Specialized Calibration/Maintenance Assistance Tool
2、 Functional purpose
This tool is used to ensure that the elevator lifting platform is in a precise vertical travel and horizontal positioning state before or after equipment operation or maintenance, ensuring that the alignment accuracy between the wafer and the transfer robotic arm meets the standard, and avoiding:
Wafer transfer failure
Platform and robotic arm interference
Wafer placement offset or fragmentation
The cavity door cannot be closed correctly
4、 Overview of usage methods
Install alignment tool: Fix the 73-0068 tool on the elevator platform or specific calibration fixture position
Manual/software controlled lifting: Move the platform to the designated "alignment reference point"
Use a feeler gauge or visual inspection platform to check the gap between the platform and the reference edge
Adjust the initial position of the mechanical limit screw or motor (if any)
Repeatedly testing the wafer grasping and releasing accuracy of the transmission robotic arm
5、 Precautions
The tool should be used in conjunction with the original factory standard cavity (note the code and cavity model)
Ensure that the platform is free of debris and the tray is not warped before use
Operators should wear gloves and use anti-static tools
If combined with software calibration, the motion table parameters should be confirmed synchronously
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
