Gasonics 95-3510-44气门组件

Gasonics    95-3510-44气门组件

1.产 品 资 料 介 绍：

英文资料：

1、 Basic Information

Project Content

Part number 95-3510-44

Name: Valve Assembly

Applicable equipment Gasonics plasma cleaning system (such as AURA, A-2000 series)

Manufacturer Gasonics/Novellus (now part of Applied Materials)

Type of pneumatic control module (pneumatic or electromagnetic)

2、 Functional purpose

This component is the gas flow control unit in Gasonics equipment, used to control the switching, flow direction, blowing or switching of gas, usually integrated in:

Process Chamber

Loadlock

Gas manifold

Vent/Pump pipeline interface

Commonly used in the following functional scenarios:

Function type description

Vent control chamber exhaust/ventilation

Gas on-off control for processes such as N ₂, O ₂, Ar, etc

Vacuum isolation control valve between vacuum chamber and vacuum pump

Blowing/emission control blowing gas switching or exhaust gas discharge path

3、 Component composition (typical valve components)

Although the specific structure of 95-3510-44 needs to refer to the physical object or manual, a typical Gasonics valve assembly includes the following parts:

Component Description

Main valve body high cleanliness pneumatic or electromagnetic control valve

Electromagnetic coil drives valve core action (can be controlled by 24VDC)

Connectors/pipe fittings for connecting to Swagelok or VCR pipelines

The bracket or module base is installed in the gas cabinet inside the equipment

Connect the signal cable interface to the control board (such as A90 series) to output signals

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218