Gasonics 94-3441负载锁外门
1.产 品 资 料 介 绍：
Gasonics 94-3441 负载锁外门
产品功能：
作为 Gasonics 等离子体设备中负载锁腔体（Load Lock Chamber）的外部隔离门使用
实现晶圆在进入或退出设备前与外部环境的物理隔离
与设备内部的真空系统、升降电梯、机器人协同工作，保证在真空与大气之间安全、高效转移晶圆
提供气密性保护，防止微粒、湿气、氧气等污染物进入负载锁区域
应用领域：
半导体制造设备：晶圆上下料系统
等离子体剥离设备：如 AURA、A-2000、PEP 等系列中用于晶圆封闭转移
真空工艺平台：包括前段工艺处理设备、预清洗、蚀刻与封装清洗系统
洁净室自动化系统：需要腔体与外部环境快速切换的封闭门系统
特点：
工业级铝合金或不锈钢结构，耐腐蚀、强度高
配备高可靠性密封圈，确保高真空环境稳定运行
支持与机械臂、负载锁电梯联动的自动启闭机制
结构紧凑，安装维护方便，适配多种 Gasonics 系列设备
英文资料：
Gasonics 94-3441 Load Lock Outer Door
Product Features:
Used as an external isolation door for the Load Lock Chamber in Gasonics plasma equipment
Implement physical isolation of wafers from the external environment before entering or exiting the equipment
Collaborate with the vacuum system, elevators, and robots inside the equipment to ensure safe and efficient transfer of wafers between vacuum and atmosphere
Provide air tightness protection to prevent particles, moisture, oxygen and other pollutants from entering the load lock area
Application areas:
Semiconductor manufacturing equipment: wafer loading and unloading system
Plasma stripping equipment: used for wafer enclosed transfer in series such as AURA, A-2000, PEP, etc
Vacuum process platform: including front-end processing equipment, pre cleaning, etching, and packaging cleaning systems
Cleanroom automation system: a closed door system that requires rapid switching between the chamber and the external environment
characteristic:
Industrial grade aluminum alloy or stainless steel structure, corrosion-resistant and high strength
Equipped with high reliability sealing rings to ensure stable operation in high vacuum environments
Support automatic opening and closing mechanism linked with robotic arm and load lock elevator
Compact structure, easy installation and maintenance, compatible with various Gasonics series equipment
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
