Gasonics 02-20-01内室转移机器人

 Gasonics 02-20-01内室转移机器人 

1.产 品 资 料 介 绍：

一、产品概述

Gasonics 02-20-01 是专为半导体等离子处理设备设计的 内室转移机器人（In-Chamber Transfer Robot）。该机器人负责在设备腔体内部实现晶圆或工件的精确搬运和定位，通常在高洁净度和真空环境下工作，保证晶圆在等离子处理过程中安全、快速地完成上下片、转移和对位。其机械结构紧凑，动作灵活，配备高精度驱动系统及位置反馈装置。

二、应用领域

1. 半导体等离子剥离与清洗设备

• 作为腔体内晶圆的搬运装置，实现晶圆从负载锁到处理腔的转移；

• 支持多轴联动，保证晶圆精准对位，提高工艺重复性。

2. 晶圆制造自动化生产线

• 在高度自动化的生产环境中配合机器人手臂及上下料系统，完成连续生产作业；

• 降低人工操作带来的污染风险。

3. 薄膜沉积与蚀刻设备

• 作为关键的物料搬运环节，确保晶圆在不同工艺步骤间安全高效转移；

• 适应不同尺寸晶圆的处理需求。

4. 研发与实验平台

• 用于科研机构及工艺开发平台的等离子设备，方便快速切换样品，支持多工艺验证。

英文资料：

1、 Product Overview

Gasonics 02-20-01 is an In Chamber Transfer Robot designed specifically for semiconductor plasma processing equipment. This robot is responsible for precise handling and positioning of wafers or workpieces inside the equipment chamber, usually working in a high cleanliness and vacuum environment to ensure safe and fast loading, unloading, transfer, and alignment of wafers during plasma processing. Its mechanical structure is compact, the action is flexible, and it is equipped with a high-precision drive system and position feedback device.

2、 Application Fields

1. Semiconductor plasma stripping and cleaning equipment

As a handling device for wafers inside the cavity, it enables the transfer of wafers from the load lock to the processing cavity;

Support multi axis linkage to ensure precise wafer alignment and improve process repeatability.

2. Automated wafer manufacturing production line

Collaborate with robotic arms and loading and unloading systems in highly automated production environments to complete continuous production operations;

Reduce the pollution risk caused by manual operation.

3. Thin film deposition and etching equipment

As a critical material handling step, ensure the safe and efficient transfer of wafers between different process steps;

Adapt to the processing requirements of wafers of different sizes.

4. Research and experimental platform

Plasma equipment used for research institutions and process development platforms, facilitating quick sample switching and supporting multi process validation.

2.产      品      展      示      

3.其他产品

KOLLMORGEN CP310250 PRD-P310250Z-55  伺服驱动器

 61-0475-20轴控制模块

SANYO  P30B06010DXS8SM 伺服电机

4.其他英文产品

RADISYS 451558-004 Communication Module

ABB UN0942b-P Programmable Controller

Teknic SST-1500-XCX Digital Servo Drive

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218