Gasonics NL-10256-16波导传感器

 Gasonics NL-10256-16波导传感器

1.产 品 资 料 介 绍：

一、产品概述

Gasonics NL-10256-16 是一款专用于等离子处理设备的 波导传感器（Waveguide Sensor），其主要功能是传输和检测微波信号，支持设备中等离子发生器的稳定运行。该传感器设计用于高频微波信号的传输路径，确保信号的高效传递和波形完整，有助于等离子体的产生和控制。

二、应用领域

1. 等离子剥离和蚀刻设备

• 作为微波传输链路中的关键组件，传递微波能量至等离子腔体，维持等离子体稳定；

• 用于 Aura、PEP 等 Gasonics 等离子设备。

2. 等离子清洗系统

• 确保微波源信号有效传输，优化清洗工艺的能量输入；

• 实时监测波导状况，辅助设备诊断。

3. 半导体及薄膜制造设备

• 在微波辅助薄膜沉积、表面活化等工艺中，保证微波频率和功率的精准传递；

• 支持高频信号传导，减少能量损耗。

英文资料：

1、 Product Overview

Gasonics NL-10256-16 is a waveguide sensor specifically designed for plasma processing equipment. Its main function is to transmit and detect microwave signals, supporting the stable operation of plasma generators in the equipment. This sensor is designed for the transmission path of high-frequency microwave signals, ensuring efficient signal transmission and waveform integrity, which is helpful for the generation and control of plasma.

2、 Application Fields

1. Plasma stripping and etching equipment

As a key component in the microwave transmission link, it transfers microwave energy to the plasma chamber to maintain plasma stability;

Used for Gasonics plasma equipment such as Aura and PEP.

2. Plasma cleaning system

Ensure effective transmission of microwave source signals and optimize energy input for cleaning processes;

Real time monitoring of waveguide condition to assist in equipment diagnosis.

3. Semiconductor and thin film manufacturing equipment

Ensure precise transmission of microwave frequency and power in processes such as microwave-assisted thin film deposition and surface activation;

Support high-frequency signal transmission to reduce energy loss.

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218