Gasonics A95-023-03气门组件

 Gasonics A95-023-03气门组件 

1.产 品 资 料 介 绍：

一、产品概述

Gasonics A95-023-03 是专用于等离子处理设备的 气门组件（Valve Assembly），用于控制设备内的气体流量和气路切换。该气门组件能够精确调节气体进出腔体的流动，确保等离子工艺所需气体环境的稳定性和准确性，是气体供应系统中的关键部件。

二、应用领域

1. 等离子剥离和蚀刻设备

• 控制工艺气体（如氩气、氟化气体）进入反应腔体的流量和压力；

• 实现气路的快速切换和密封，保证工艺稳定。

2. 等离子清洗与表面处理设备

• 管理各种反应气体的流通，支持多工艺参数切换；

• 保证气体供应的精确度和响应速度。

3. 半导体制造中的气体管理系统

• 在复杂气路系统中实现气体的分配与控制；

• 适用于洁净室环境，减少泄漏和污染风险。

英文资料：

1、 Product Overview

Gasonics A95-023-03 is a valve assembly specifically designed for plasma processing equipment, used to control gas flow and gas path switching within the equipment. This valve assembly can accurately regulate the flow of gas into and out of the chamber, ensuring the stability and accuracy of the gas environment required for plasma processes, and is a key component in the gas supply system.

2、 Application Fields

1. Plasma stripping and etching equipment

Control the flow rate and pressure of process gases (such as argon and fluorine gases) entering the reaction chamber;

Realize rapid switching and sealing of gas paths to ensure process stability.

2. Plasma cleaning and surface treatment equipment

Manage the circulation of various reaction gases and support the switching of multiple process parameters;

Ensure the accuracy and response speed of gas supply.

3. Gas management systems in semiconductor manufacturing

Realize gas distribution and control in complex gas path systems;

Suitable for cleanroom environments, reducing the risk of leaks and contamination.

2.产      品      展      示      

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ABB XVC768115 thyristor module

ASEA 57520001-U circuit board

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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