Gasonics 97-0197控制主板
1.产 品 资 料 介 绍：
一、产品概述
Gasonics 97-0197 是 Gasonics 等离子体设备（如 Aura、PEP 系列）中用于设备核心控制的 控制主板（Main Control Board）。该主板作为整机的大脑，负责协调、管理设备内所有关键子系统（如RF电源、气体控制、升降平台、机器人手臂等）的运行与通信。它集成了多种I/O接口、处理器模块和通信总线（如CAN、RS-232/422、I²C等），支持实时数据处理与硬件联动控制。
二、应用领域
1. 等离子剥离和清洗系统（如 Gasonics Aura 3010 / PEP 3510 系列）
控制整机流程逻辑，如真空控制、RF功率控制、工艺计时等；
实现与用户HMI界面或上位机软件的指令交互。
2. 自动搬运与负载锁子系统
协调升降机、晶圆搬运臂等模块动作；
实现晶圆精准上下片的联动流程。
3. 工艺控制与气体流量管理系统
读取传感器数据并控制质量流量计、电磁阀、真空阀等部件；
保证各类工艺气体的精确控制。
英文资料：
1、 Product Overview
Gasonics 97-0197 is a control board used for core control in Gasonics plasma equipment (such as Aura and PEP series). This motherboard serves as the brain of the entire machine, responsible for coordinating and managing the operation and communication of all key subsystems within the device, such as RF power supply, gas control, lifting platform, robot arm, etc. It integrates multiple I/O interfaces, processor modules, and communication buses (such as CAN, RS-232/422, I ² C, etc.), supporting real-time data processing and hardware linkage control.
2、 Application Fields
1. Plasma stripping and cleaning system (such as Gasonics Aura 3010/PEP 3510 series)
Control the overall process logic, such as vacuum control, RF power control, process timing, etc;
Implement instruction interaction with user HMI interface or upper computer software.
2. Automatic handling and load locking subsystem
Coordinate the movements of modules such as elevators and wafer handling arms;
Realize the precise linkage process of wafer loading and unloading.
3. Process control and gas flow management system
Read sensor data and control components such as mass flow meters, solenoid valves, vacuum valves, etc;
Ensure precise control of various process gases.
2.产 品 展 示
3.其他产品
4.其他英文产品
ABB SB822 3BSE018172R1 rechargeable
ABB UN0803B-P Printed Circuit Board
| 6ES5375-0LC31 | CACR-SR05SZ1SSY216 | 6DD2920-0XG04 |
| 6ES5375-0LB11 | 6SC6500-0NA01 | 6DD2920-0XG03 |
| 6ES5375-0LA15 | CACR-IR10SFB, | 6ES5318-8MB11 |
| 6ES5374-2KL21 | CACR-SR44BY1SD-Y48 | 6DD2920-0XG02 |
| 6ES5374-2FP22 | CACR-SR20TB5BM | 6ES5314-3UA11 |
| 6ES5374-2AL21 | 6SC9111-2AJ45 | 1BF41-0BC0 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
