Gasonics RD-323M10步进驱动器
1.产 品 资 料 介 绍：
产品名称：Gasonics RD-323M10 步进驱动器
部件类型：步进电机驱动模块（Stepper Motor Driver Module）
主要用途：控制步进电机的精确动作，实现晶圆在设备内部的平稳移动或升降操作
一、等离子清洗设备中的运动控制系统
该驱动器用于 Gasonics 等离子体处理设备中，驱动步进电机完成晶圆搬运或执行机构的定位运动。
典型应用：
负载锁电梯（Load Lock Elevator）的上下移动控制
Wafer handler 传送平台的水平移动控制
Valve、shutter（快门）等部件的线性开启/关闭控制
二、晶圆搬运系统的步进电机控制
该驱动器模块被集成在 wafer handling 系统中，实现精准的步进控制，确保晶圆从 FOUP 或 Cassette 到处理腔体的顺利转移。
应用对象：
晶圆搬运机械手（Robot Arm）
升降台（Elevator Lift）
XY 水平平台轨道驱动单元
三、控制精度要求高的自动化装置
步进驱动器在处理过程中确保动作同步、定位精准，适用于 Gasonics Aura 系列等对搬运重复精度要求高的工艺。
控制特性：
微步驱动（Microstepping）
电流限制与过热保护
与主控系统通过 TTL 或 PLC 接口联动
英文资料：
Product Name: Gasonics RD-323M10 Stepper Driver
Component type: Stepper Motor Driver Module
Main purpose: To control the precise movement of stepper motors and achieve smooth movement or lifting of wafers inside the equipment
1、 Motion Control System in Plasma Cleaning Equipment
This driver is used in Gasonics plasma processing equipment to drive stepper motors to complete wafer handling or actuator positioning movements.
Typical applications:
Up and down movement control of load lock elevator
Horizontal movement control of wafer handler transfer platform
Linear opening/closing control of components such as valves and shutters
2、 Stepper motor control of wafer handling system
This driver module is integrated into the wafer handling system to achieve precise step control, ensuring smooth transfer of wafers from FOUP or Cassette to the processing chamber.
Application object:
Wafer handling robot arm
Elevator Lift
XY horizontal platform track drive unit
3、 Automation devices with high control accuracy requirements
The stepper driver ensures synchronized actions and precise positioning during the processing, making it suitable for processes such as the Gasonics Aura series that require high precision in handling.
Control characteristics:
Microstepping driver
Current limitation and overheating protection
Linkage with the main control system through TTL or PLC interface
2.产 品 展 示
3.其他产品
4.其他英文产品
UFC760BE143 inverter high-voltage board
ABB 70EB01b-E digital input module
ABB 70BV05a-ES bus controller module
| 33VM62-220-16 | CACR-SR20TZ0SF-E | 740-689986-001 |
| 33VM62-220-1 | 6SC6500-0NA02 | 820-10736-000-H |
| 33VM62-200-72 | 6SC6503-0AG01 | F31X137TRGACG1 |
| 33VM62-200-1 | CACR-SR20BF12GE | 720-23475-000 |
| 33VM62-108-8 | CACR-CSL20DAAA | F31X122PCNAFG1 |
| 33VM62-100-4 | 3090-SMA-220 | 710-659274-00 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
