Gasonics A89-004-01光学传感器

 Gasonics A89-004-01光学传感器

1.产 品 资 料 介 绍：

产品名称：Gasonics A89-004-01 光学传感器
部件类型：非接触式光电检测器（Photoelectric Sensor）
主要功能：在 Gasonics 等离子处理设备中，用于位置检测、运动反馈、状态确认等自动化控制任务

一、负载锁系统位置检测

该传感器常用于负载锁（Load Lock）或升降机构的位置确认，用于判定晶圆托盘、升降平台是否到位或完成动作。

典型监测对象：

• 升降板顶/底位（如 A90-029-03）

• 负载锁门开闭状态

• 晶圆到位/离位检测

二、腔体门与工艺舱安全联锁

A89-004-01 可作为安全互锁传感器，确保舱门或腔体部件处于正确位置后才能启动等离子工艺，提升设备运行安全性。

常见联锁点：

• 工艺腔体门关闭确认

• 腔体内夹持机构复位检测

• 防止误处理或误动作触发

三、步进运动控制反馈

在使用步进驱动器（如 RD-323M10）控制的平台或托盘移动系统中，该光学传感器可提供动作完成信号，用于同步逻辑判断与下一步流程触发。

典型功能：

• 原点复位检测

• 动作完成标志

• 异常中断检测（行程超限）

英文资料：

Product Name: Gasonics A89-004-01 Optical Sensor

Component type: Non contact photoelectric sensor

Main function: Used for automated control tasks such as position detection, motion feedback, and status confirmation in Gasonics plasma processing equipment

1、 Load lock system position detection

This sensor is commonly used for load lock or lifting mechanism position confirmation, to determine whether the wafer tray and lifting platform are in place or have completed the action.

Typical monitoring objects:

Lift plate top/bottom position (such as A90-029-03)

Load lock door open/close status

Wafer in/out of position detection

2、 Chamber door and process compartment safety interlock

A89-004-01 can be used as a safety interlock sensor to ensure that the cabin door or cavity components are in the correct position before starting the plasma process, thereby improving the safety of equipment operation.

Common interlocking points:

Confirmation of process chamber door closure

Reset detection of clamping mechanism inside the cavity

Prevent mishandling or triggering of incorrect actions

3、 Step motion control feedback

In a platform or tray movement system controlled by a stepper driver (such as RD-323M10), this optical sensor can provide an action completion signal for synchronizing logic judgment with the next process trigger.

Typical functions:

Origin reset detection

Action completion flag

Abnormal interruption detection (travel exceeding limit)

2.产      品      展      示      

3.其他产品

ETHERWAN EMC1600以太网交换机

Lenze MDFKARS080-22伺服电机

Fanuc  A06B-6114-H205 伺服放大器

4.其他英文产品

ASEA ES1211 module board

ABB UN0807C-P Programmable Controller

HE700GEN200 Network Interface Module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218