Gasonics 853-4290-002负载锁电梯模块
1.产 品 资 料 介 绍：
产品名称
Gasonics 853-4290-002 负载锁电梯模块
产品应用领域
负载锁室晶圆升降控制
用于 Gasonics 等离子设备中，控制晶圆在负载锁（Load Lock）腔体内的升降动作，实现晶圆从载具到工艺腔的平稳过渡。自动上下料系统核心部件
作为自动化搬运系统中的关键执行模块，与真空机械臂协同完成晶圆的精确定位与传输。工艺前后传输缓冲
在真空环境下提供工艺前后晶圆临时存放及上下位调整，有效隔离工艺腔与外部环境，保障真空工艺稳定性。位置控制与传感反馈
搭配位置传感器精确控制电梯行程，提供实时位置反馈，实现闭环控制，提升设备运行安全性和精度。设备维护与替换模块
常用于 Aura 或 A3000 系列设备的负载锁系统维护，作为原厂替换部件，用于修复升降故障或提升传输性能。洁净环境中精密运动控制
设计满足洁净室使用要求，适用于对粒子控制严格的半导体制造环境中的精密机械运动。
英文资料：
product name
Gasonics 853-4290-002 Load Lock Elevator Module
Product application areas
Load lock chamber wafer lifting control
Used in Gasonics plasma equipment to control the lifting action of wafers in the load lock chamber, achieving a smooth transition of wafers from the carrier to the process chamber.
Core components of automatic loading and unloading system
As a key execution module in automated handling systems, it collaborates with vacuum robotic arms to achieve precise positioning and transfer of wafers.
Pre - and post process transmission buffering
Provide temporary storage and adjustment of wafers before and after the process in a vacuum environment, effectively isolating the process chamber from the external environment and ensuring the stability of the vacuum process.
Position control and sensor feedback
Equipped with position sensors for precise control of elevator travel, providing real-time position feedback, achieving closed-loop control, and improving equipment operation safety and accuracy.
Equipment maintenance and replacement module
Commonly used for load lock system maintenance of Aura or A3000 series equipment, as a factory replacement component, used to repair lifting faults or improve transmission performance.
Precise motion control in clean environment
Designed to meet the requirements for clean room use and suitable for precision mechanical motion in semiconductor manufacturing environments with strict particle control.
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
