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AMAT 0010-30770 真空泵阀

发布时间:2026-07-15人气:

AMAT 0010-30770 真空泵阀 

1.产 品 资 料 介 绍:

AMAT 0010-30770 真空泵阀用于半导体真空设备泵路隔断,密封可靠,原厂适配。
1、气动驱动,开关反应快
2、断气自锁,防止泵油倒灌腔体
3、不锈钢阀体,洁净低发尘
4、耐腐蚀密封,适配各类工艺气体
5、泄漏量低,维持腔体真空度
6、带到位信号反馈,方便设备监控
7、流道不易积尘,减少颗粒污染
8、可长期高低温环境稳定使用
9、启闭寿命长,适合频繁工艺切换
10、标准法兰,拆装更换简单
11、阻隔气流回流,稳定腔体内压力
12、抗等离子腐蚀,适配刻蚀沉积设备
13、同系列 AMAT 设备可直接替换
14、出厂真空检漏,密封性稳定
15、体积小巧,管路安装不占空间
综上,AMAT 0010-30770 真空泵阀密封性好、耐用洁净,是真空机组必备隔离阀门。

AMAT 0010-30770 真空泵阀  产品英文

AMAT 0010-30770 vacuum pump valve is used for isolating the pump circuit of semiconductor vacuum equipment, with reliable sealing and original factory compatibility.

1. Pneumatic drive, fast switch response

2. Gas shut-off self-locking to prevent pump oil from flowing back into the chamber

3. Stainless steel valve body, clean and low dust emission

4. Corrosion resistant seal, compatible with various process gases

5. Low leakage rate, maintaining the vacuum degree of the chamber

6. Equipped with accurate signal feedback for easy device monitoring

7. The flow channel is less prone to dust accumulation and reduces particle pollution

8. Can be used stably in high and low temperature environments for a long time

9. Long opening and closing life, suitable for frequent process switching

10. Standard flange, easy to disassemble and replace

11. Block airflow backflow and stabilize the pressure inside the chamber

12. Anti plasma corrosion, compatible with etching and deposition equipment

13. AMAT devices of the same series can be directly replaced

14. Factory vacuum leak detection, stable sealing performance

15. Compact size, pipeline installation does not take up space

Overall, AMAT 0010-30770 vacuum pump valve has good sealing, durability, and cleanliness, making it an essential isolation valve for vacuum units.

AMAT 0010-30770 真空泵阀   产品展示

a_n_corporation_pneumatic_actuato_1539-s-n_15-39-sn_w_vacuun_pump_0010-30770.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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