Gasonics 27-286643-00控制器板模块
1.产 品 资 料 介 绍：
产品名称
Gasonics 27-286643-00 控制器板模块
产品应用领域
等离子灰化设备核心控制模块
应用于 Gasonics Aura 2000LL 等型号的等离子去胶、灰化处理系统，作为设备主控逻辑核心。工艺流程逻辑控制
管理整个工艺流程的信号处理、顺序执行、参数设定及过程联锁，确保设备按设定逻辑自动运行。子系统协调调度
控制并协调射频电源、真空泵、气路系统、晶圆搬运平台等多个子系统协同工作。信号处理与命令执行
接收来自操作界面或上位机的控制命令，执行工艺参数配置和过程启动、暂停、报警等功能。固件逻辑存储与执行
板上可配置 EPROM 固件，用于存储控制程序逻辑，实现版本管理和功能定制。设备维修与模块更换
常用作设备控制故障后的替换模块，恢复系统功能，是设备维护保养中的关键备件。
英文资料：
product name
Gasonics 27-286643-00 Controller Board Module
Product application areas
Core control module of plasma ashing equipment
Applied to plasma debonding and ashing processing systems of Gasonics Aura 2000LL and other models, serving as the main control logic core of the equipment.
Process logic control
Manage the signal processing, sequential execution, parameter setting, and process interlocking of the entire process flow to ensure that the equipment operates automatically according to the set logic.
Subsystem coordination and scheduling
Control and coordinate the collaborative work of multiple subsystems such as RF power supply, vacuum pump, gas path system, wafer handling platform, etc.
Signal processing and command execution
Receive control commands from the operating interface or upper computer, perform process parameter configuration and functions such as process start, pause, alarm, etc.
Firmware Logical Storage and Execution
EPROM firmware can be configured on the board to store control program logic, achieve version management, and customize functions.
Equipment maintenance and module replacement
Commonly used as a replacement module for equipment control failures to restore system functionality, it is a key spare part in equipment maintenance and upkeep.
2.产 品 展 示
3.其他产品
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
