AMAT 0100-38027探测器板组件

AMAT  0100-38027探测器板组件

1.产 品 资 料 介 绍：

AMAT 0100-38027 探测器板组件

产品概述

AMAT（Applied Materials）0100-38027 探测器板组件是一种安装在半导体制造设备中的电子功能模块，主要用于信号检测、工艺监控和数据采集。它通常作为探测器与主控制系统之间的接口电路，负责接收、放大、滤波和处理来自传感器或探头的信号，以便实现对工艺环境和运行状态的实时监控。该组件在沉积、刻蚀、离子注入等工艺中都可能作为关键监测环节。

技术参数（典型方向，具体参数需参考原厂资料）

• 电路结构：多层印刷电路板，集成探测电路与信号处理模块

• 信号类型：支持模拟与数字信号输入，具备高速采样能力

• 功能特性：信号放大、噪声抑制、数据转换与传输

• 工作环境：适应半导体设备高真空、低颗粒及高洁净度环境

• 接口：兼容 AMAT 设备主控制器和上位机系统

应用场景

1. 薄膜沉积工艺（CVD/PVD/ALD）

   • 检测沉积过程中反应气体或腔体环境变化，辅助闭环控制。

   • 采集等离子体发光或反射信号，用于膜厚监控。

2. 刻蚀工艺

   • 监控等离子体状态、发射光谱或反应副产物信号。

   • 帮助实现刻蚀终点检测（End Point Detection, EPD）。

3. 离子注入系统

   • 检测离子束流强度或分布，保证注入剂量和均匀性。

4. 真空腔体状态检测

   • 与传感器配合，实时监控腔体内压力、气体流量和温度信号。

5. 工厂自动化与安全

   • 作为工艺检测与报警触发的前端电路，保障工艺稳定与设备安全。

AMAT 0100-38027探测器板组件 英文资料：

AMAT 0100-38027 Detector Board Component

Product Overview

AMAT (Applied Materials) 0100-38027 detector board assembly is an electronic functional module installed in semiconductor manufacturing equipment, mainly used for signal detection, process monitoring, and data acquisition. It usually serves as an interface circuit between the detector and the main control system, responsible for receiving, amplifying, filtering, and processing signals from sensors or probes to achieve real-time monitoring of the process environment and operating status. This component may serve as a key monitoring link in processes such as deposition, etching, and ion implantation.

Technical parameters (typical direction, specific parameters need to refer to the original factory information)

Circuit structure: multi-layer printed circuit board, integrated detection circuit and signal processing module

Signal type: Supports analog and digital signal input, with high-speed sampling capability

Functional features: signal amplification, noise suppression, data conversion and transmission

Work environment: Suitable for high vacuum, low particle, and high cleanliness environments of semiconductor equipment

Interface: Compatible with AMAT device main controller and upper computer system

Application scenarios

Thin film deposition process (CVD/PVD/ALD)

Detecting changes in reaction gases or chamber environment during the sedimentation process to assist in closed-loop control.

Collect plasma luminescence or reflection signals for film thickness monitoring.

etching process

Monitor plasma state, emission spectra, or reaction byproduct signals.

Assist in achieving End Point Detection (EPD) for etching.

Ion implantation system

Detect ion beam intensity or distribution to ensure injection dose and uniformity.

Vacuum chamber status detection

Cooperate with sensors to monitor real-time pressure, gas flow rate, and temperature signals inside the chamber.

Factory Automation and Safety

As a front-end circuit for process detection and alarm triggering, it ensures process stability and equipment safety.

AMAT 0100-38027探测器板组件 产品展示      

 产品视频

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SST-PFB-SLC Communication module
BENTLY 125760-01 vibration monitor
BENLTY 125840-01 Monitor card

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218