1.产 品 资 料 介 绍：
- 规格参数：VDMW300022V2采用 250V/3A 供电保护，蒸汽流量范围约 3 SLPM H₂O，铝合金外壳搭配 CE 认证，符合工业安全标准
- 接口配置：含模拟数字 I/O、专属 DIAG 诊断端口、以太网接口及排液快插接头，背面接口布局规整，标签清晰易识别
- 可靠性：VDMW300022V2采用工业级防护设计，外观整洁无拆修，经电源与接口功能检测，支持竖直安装（进口向下）方式
- 典型场景：VDMW300022V2适配半导体工艺设备、光电薄膜与显示器制造、纳米材料沉积、实验室蒸汽输送试验
- 核心价值：作为 Celerity VDM 系列主力型号，VDMW300022V2保障前驱体汽化均匀性，提升工艺稳定性，简化系统集成与维护流程，是设备替换、维修或二次集成的优选型号
VDMW300022V2蒸汽交付模块 英文资料：
Core positioning
The core model VDMW300022V2 steam delivery module of the Celery brand VDM series in the United States is designed to uniformly vaporize liquid chemical precursors and accurately transport them. It is specifically designed for semiconductor and thin film processing scenarios and is compatible with reaction chamber systems such as CVD, ALD, PECVD, etc. It is the main model of this series for medium flow precision processes.
Core product features
VDMW300022V2 has high-precision gasification and flow control capabilities, with a stable steam flow rate within the range of 3 SLPM H ₂ O, ensuring uniform transportation and meeting the precision process requirements for semiconductor thin film deposition; Supports dual communication interfaces of Ethernet and I/O, enabling remote monitoring and local control, with flexible and convenient operation; Modular design with compact structure, integrating 250V/3A fast melting fuse protection and dedicated diagnostic port, easy maintenance and high safety; Compatible with various liquid precursors such as TEOS, TDMAT, DEZ, etc., with strong compatibility, suitable for multiple types of thin film deposition processes.
Quick overview of key features
Specification parameters: VDMW300022V2 adopts 250V/3A power supply protection, steam flow range of about 3 SLPM H ₂ O, aluminum alloy shell with CE certification, in compliance with industrial safety standards
Interface configuration: including analog digital I/O, dedicated DIAG diagnostic port, Ethernet interface, and drain quick plug connector. The layout of the back interface is neat, and the labels are clear and easy to identify
Reliability: VDMW300022V2 adopts industrial grade protection design, with a clean appearance and no disassembly or repair. After power and interface function testing, it supports vertical installation (imported downward)
Application scenarios
Typical scenarios: VDMW300022V2 adaptation to semiconductor process equipment, optoelectronic thin film and display manufacturing, nanomaterial deposition, laboratory steam transport testing
Core value: As the main model of the Celery VDM series, VDMW300022V2 ensures the uniformity of precursor vaporization, improves process stability, simplifies system integration and maintenance processes, and is the preferred model for equipment replacement, repair, or secondary integration
VDMW300022V2蒸汽交付模块 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
