NOVELLUS  02-113640-00系统控制器   

1.产 品 资 料 介 绍：

NOVELLUS 02-113640-00 系统控制器（MC1 P166）

1. 工业级 P166 处理器架构：搭载 Pentium P166 处理器，64MB 内存，满足半导体设备实时控制与多任务处理需求。
2. MC1 系列专用主控平台：属于 Novellus MC1 标准系统控制器，适配 Concept、Speed、Altus 等主流沉积设备。
3. 精密工艺时序控制：支持微秒级工艺时序调度，精准控制气体、真空、温度、射频等多环节协同。
4. 多路 I/O 信号管理：集成数字 / 模拟 I/O 接口，可直连传感器、阀门、电源、运动模块等外围执行单元。
5. 双路通信接口：标配 Ethernet 与 RS-485，支持 Modbus TCP/IP 协议，实现设备联网与远程监控。
6. 内置 PID 闭环控制：提供高精度 PID 算法，保障温度、压力、流量等工艺参数稳定在设定范围。
7. 宽电压供电设计：支持 220V 工业供电，适配半导体工厂标准配电环境。
8. IP65 防护等级：防尘防水，可在洁净室、高粉尘等严苛工业环境稳定运行。
9. CE/UL/RoHS 认证：符合国际安全与环保标准，满足全球半导体产线合规要求。
10. 硬件级故障诊断：板载状态指示灯与故障检测电路，支持快速定位硬件异常。
11. 固件在线升级：支持通过网络或本地端口更新控制程序，无需拆机，维护便捷。
12. 高集成度紧凑设计：尺寸约 10×15×20cm，重量 1.5kg，节省设备内部空间。
13. 长周期稳定运行：工业级元器件选型，无风扇散热，平均无故障时间（MTBF）满足半导体设备高可靠要求。
14. 兼容 Novellus 原厂软件：无缝对接 Novellus 设备控制软件与工艺配方系统，降低集成成本。
15. 备件与维修体系完善：作为成熟机型，全球备件渠道与维修服务成熟，保障设备长期服役。

NOVELLUS  02-113640-00系统控制器  英文资料：

NOVELLUS 02-113640-00 System Controller (MC1 P166)

Novellus 02-113640-00 is a P166 level embedded system controller of the Novellus (now Lam Research) MC1 series, designed specifically for precision deposition equipment such as semiconductor CVD/PVD. It is the core unit for equipment process control, timing scheduling, and I/O management. The following are 15 core features:

Industrial grade P166 processor architecture: Equipped with a Pentium P166 processor and 64MB of memory, it meets the real-time control and multitasking requirements of semiconductor devices.

MC1 series dedicated main control platform: It belongs to the Novellus MC1 standard system controller and is compatible with mainstream deposition equipment such as Concept, Speed, Altus, etc.

Precision process timing control: supports microsecond level process timing scheduling, precise control of gas, vacuum, temperature, RF and other multi link coordination.

Multi channel I/O signal management: Integrated digital/analog I/O interfaces, which can directly connect peripheral execution units such as sensors, valves, power supplies, and motion modules.

Dual communication interface: comes standard with Ethernet and RS-485, supports Modbus TCP/IP protocol, and enables device networking and remote monitoring.

Built in PID closed-loop control: Provides high-precision PID algorithm to ensure stable process parameters such as temperature, pressure, and flow rate within the set range.

Wide voltage power supply design: Supports 220V industrial power supply and adapts to the standard distribution environment of semiconductor factories.

IP65 protection level: dustproof and waterproof, can operate stably in harsh industrial environments such as clean rooms and high dust.

CE/UL/RoHS certification: Compliant with international safety and environmental standards, meeting global semiconductor production line compliance requirements.

Hardware level fault diagnosis: onboard status indicator lights and fault detection circuits, supporting rapid localization of hardware abnormalities.

Firmware online upgrade: Supports updating control programs through network or local ports without the need for disassembly, making maintenance convenient.

High integration and compact design: with dimensions of approximately 10 × 15 × 20cm and a weight of 1.5kg, saving internal space of the equipment.

Long cycle stable operation: Industrial grade component selection, fanless heat dissipation, and mean time between failures (MTBF) meet the high reliability requirements of semiconductor equipment.

Compatible with Novellus original software: seamlessly integrate with Novellus device control software and process formulation system, reducing integration costs.

Complete spare parts and maintenance system: As a mature model, the global spare parts channels and maintenance services are mature, ensuring the long-term service of equipment.

In summary, NOVELLUS 02-113640-00, with P166 high performance, precision process control, and high reliability industrial design as its core, is a key control component for semiconductor deposition equipment to achieve automation, high precision, and stable operation. It is widely used in the thin film deposition process of wafer manufacturing.

NOVELLUS  02-113640-00系统控制器  产品展示

产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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