1.产 品 资 料 介 绍：
TOKYO TME302B09DWG 机器人组件
- 原厂标准结构，适配东京电子系列晶圆传送设备
- 多轴协同传动，搬运走位重复定位精度高
- 内置伺服驱动线路，动作响应快无卡顿延迟
- 金属密封壳体，隔绝车间射频电磁干扰
- 集成限位防撞结构，防止机械手磕碰晶圆
- 多路工业通讯接口，可对接整机主控系统
- 散热结构优化，24 小时连续运行温升可控
- 模块化分体设计，拆装检修更换便捷
- 线路分区隔离，单部件故障不影响整机运行
- 自带运行状态反馈，故障点位快速排查
- 洁净室专用防护，防尘防潮耐腐蚀
- 负载适配稳定，适配不同尺寸晶圆搬运
- 支持多套搬运程序一键切换适配工艺
- 原装精密传动元器件，磨损小寿命更长
- 标准化安装孔位，无需改造直接替换装机结尾：TOKYO TME302B09DWG 机器人组件定位精准、维护简单，是半导体晶圆传送机械手核心配套部件。
TOKYO TME302B09DWG机器人组件 产品英文
TOKYO TME302B09DWG Robot Components
Introduction: The TOKYO TME302B09DWG robot component is a semiconductor equipment wafer handling supporting assembly, responsible for driving the robotic arm, transmitting signals, and executing actions.
Original factory standard structure, compatible with Tokyo Electronics series wafer transfer equipment
Multi shaft coordinated transmission, high precision of repeated positioning during transportation
Built in servo drive circuit, fast action response without lag or delay
Metal sealed shell, isolating workshop RF electromagnetic interference
Integrated limit anti-collision structure to prevent the robotic arm from bumping into the wafer
Multi channel industrial communication interface, capable of connecting to the main control system of the entire machine
Optimization of heat dissipation structure, 24-hour continuous operation with controllable temperature rise
Modular split design, easy disassembly, maintenance, and replacement
Line partition isolation, single component failure does not affect the overall operation of the machine
Equipped with operational status feedback, quick troubleshooting of fault locations
Cleanroom specific protection, dustproof, moisture-proof, corrosion-resistant
Stable load adaptation, suitable for handling wafers of different sizes
Support one click switching of multiple handling programs to adapt to the process
Original precision transmission components with low wear and longer lifespan
Standardized installation hole positions, no need for modification, can be directly replaced for installation
Conclusion: The TOKYO TME302B09DWG robot component has precise positioning and simple maintenance, and is the core supporting component of the semiconductor wafer transfer robot arm.
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| SC752B-001-01 | AMAT 0100-35117 | 26390582-CR DSTK132 ABB |
| SC752A-001-02 | AMAT 0100-00454 | 57520001-EV DSCS140 ABB |
| SC726A-001-PM2009 | AMAT 0100-01-252 | PFEA 113-65.3PXV |
| SC726A-001 | AMAT 0100-90095 | DSDI451 ABB |
| SC725B001-01 | AMAT 0100-02075 | PFEA 112-20 |
| SC725B00101 | AMAT 0100-71121 | PFEA111-20 |
| SC725A-001-PM72016 | AMAT 00100-94015 | PFEA 113-65.2PXV |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
