1.产 品 资 料 介 绍：
DAIHEN MDC-01C-V 控制箱产品特点
- 精准调控射频输出功率，功率波动小
- 实时采集腔体负载数据，自动阻抗适配
- 内置过流、过温、短路多重安全保护
- 金属屏蔽箱体，抵御车间电磁干扰
- 标准设备通讯接口，对接整机主控
- 模块化内部布局，检修更换配件简便
- 工艺参数本地存储，断电数据不丢失
- 自带故障自检，快速显示异常代码
- 洁净级内部元器件，适配无尘车间
- 一体式散热风道，24 小时连续稳定运行
- 标准化接线端子，线路排布规整防松脱
- 原厂配套通讯协议，无需额外调试
- 小型化柜体设计，节省机柜安装空间
- 低谐波信号输出，不干扰周边精密组件
- 匹配大恒全系射频电源，整机兼容性高结尾：DAIHEN MDC-01C-V 作为射频系统核心控制单元，保障半导体等离子工艺稳定生产。
DAIHEN MDC-01C-V控制箱 产品英文
DAIHEN MDC-01C-V Control Box Product Features
Introduction: DAIHEN MDC-01C-V is a dedicated control box for semiconductor RF power supply, which controls plasma power output and is compatible with wafer coating and etching equipment.
Accurate regulation of RF output power with minimal power fluctuations
Real time collection of chamber load data, automatic impedance adaptation
Built in multiple safety protections for overcurrent, overheating, and short circuit
Metal shielding box to resist electromagnetic interference in the workshop
Standard equipment communication interface, connected to the main control of the whole machine
Modular internal layout, easy maintenance and replacement of parts
Local storage of process parameters, no loss of power-off data
Built in fault self check, quickly display abnormal codes
Clean grade internal components, suitable for dust-free workshops
Integrated heat dissipation duct, 24-hour continuous and stable operation
Standardized wiring terminals, orderly and anti loosening circuit layout
Original factory matching communication protocol, no additional debugging required
Compact cabinet design, saving cabinet installation space
Low harmonic signal output, does not interfere with surrounding precision components
Matched with Daheng's entire range of RF power supplies, the overall compatibility is high
Conclusion: DAIHEN MDC-01C-V serves as the core control unit of the RF system, ensuring stable production of semiconductor plasma processes.
DAIHEN MDC-01C-V控制箱 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
