1.产 品 资 料 介 绍：
VAT A-3000089 集成压力控制器产品特点
- 内置高精度真空传感单元，压力检测误差小
- 集成 PID 闭环调控，自动稳压抑制压力波动
- 适配半导体刻蚀、镀膜腔体真空工艺场景
- 内置多重保护，超压、过流、断线自动报警
- 金属屏蔽壳体，抵御射频电源电磁干扰
- 标准设备通讯接口，对接整机主控系统
- 一体化阀体与控制模块，节省安装空间
- 洁净级密封结构，适配无尘晶圆车间
- 实时压力数值反馈，数据传输无延迟
- 模块化结构，故障检修、更换配件便捷
- 宽温运行区间，支持设备 24 小时连续生产
- 多档位压力调节模式，适配不同工艺需求
- 原厂专用通讯协议，上机无需复杂调试
- 耐腐蚀介质通路，适配各类工艺特种气体
- 自带故障代码显示，快速定位设备异常结尾：VAT A-3000089 真空控制精度高、耐用性强，是半导体真空工艺核心压力管控部件。
VAT A-3000089 集成压力控制器 产品英文
VAT A-3000089 Integrated Pressure Controller Product Features
Introduction: VAT A-3000089 is a specialized integrated pressure controller for semiconductor vacuum chambers, integrating measurement and control to accurately and stably control the vacuum pressure inside the chamber.
Built in high-precision vacuum sensing unit with small pressure detection error
Integrated PID closed-loop control, automatic voltage stabilization to suppress pressure fluctuations
Suitable for semiconductor etching, coating cavity vacuum process scenarios
Built in multiple protections, automatic alarms for overpressure, overcurrent, and wire breakage
Metal shielding shell, resistant to electromagnetic interference from RF power supply
Standard equipment communication interface, connected to the main control system of the whole machine
Integrated valve body and control module, saving installation space
Clean grade sealed structure, suitable for dust-free wafer workshops
Real time pressure numerical feedback, data transmission without delay
Modular structure, convenient for troubleshooting and replacement of parts
Wide temperature operating range, supporting 24-hour continuous production of equipment
Multi gear pressure regulation mode, adapted to different process requirements
Original factory specific communication protocol, no need for complex debugging on the computer
Corrosion resistant medium pathway, suitable for various process special gases
Equipped with fault code display, quickly locate equipment abnormalities
Conclusion: VAT A-3000089 vacuum control has high precision and strong durability, and is the core pressure control component of semiconductor vacuum processes.
VAT A-3000089 集成压力控制器 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
