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TEL 2L80-050254-V1 压力调节器

发布时间:2026-07-27人气:
  • TEL 2L80-050254-V1 压力调节器
  • TEL 2L80-050254-V1 压力调节器
  • TEL 2L80-050254-V1 压力调节器

TEL 2L80-050254-V1 压力调节器 

1.产 品 资 料 介 绍:

TEL 2L80-050254-V1 压力调节器
1. 适配东京电子半导体工艺设备,实现工艺气体压力精准稳压调节
2. 膜片式平衡结构,压力控制线性度佳,抑制管路压力波动
3. 高纯流体通路,内壁洁净处理,满足半导体无尘工艺标准
4. 高密封性密封组件,有效杜绝微量气体泄漏风险
5. 动态响应迅速,快速补偿上下游压力变化干扰
6. 内置过载承压防护,避免压力冲击造成阀体损伤
7. 小型化本体结构,便于机台狭小空间集成安装
8. 耐温性能优异,适配腔体周边温度波动工况
9. 支持长时间不间断量产连续运行,工况稳定性强
10. 标准化接口规格,可直接匹配原厂管路组件
11. 抗震动结构设计,机台运行振动环境不易漂移
12. 压力设定持久稳定,减少频繁校准维护频次
13. 可配合压力传感组件,实现压力信号反馈监控
14. 内部零部件耐磨设计,延长阀体整体使用寿命
15. 原厂精密加工工艺,长期运行调节误差较小
TEL 2L80-050254-V1 压力调节器多用于 TEL 刻蚀、薄膜沉积设备,是工艺供气回路压力稳定控制核心阀体部件。

TEL 2L80-050254-V1 压力调节器   产品英文介绍

TEL 2L80-050254-V1 pressure regulator

1. Adapt to Tokyo Electronic Semiconductor process equipment to achieve precise pressure regulation of process gases

2. Diaphragm type balance structure, excellent pressure control linearity, and suppression of pipeline pressure fluctuations

3. High purity fluid pathway, clean inner wall treatment, meeting semiconductor dust-free process standards

4. High sealing components effectively eliminate the risk of trace gas leakage

5. Rapid dynamic response, quickly compensating for upstream and downstream pressure changes and interference

6. Built in overload pressure protection to prevent valve body damage caused by pressure impact

7. Compact body structure, easy to integrate and install in narrow spaces of the machine

8. Excellent temperature resistance, suitable for temperature fluctuations around the cavity

9. Support long-term uninterrupted mass production and continuous operation, with strong stability in working conditions

10. Standardized interface specifications that can directly match original factory pipeline components

11. Anti vibration structure design ensures that the machine operates in a vibration environment that is not prone to drift

12. The pressure setting is long-lasting and stable, reducing the frequency of frequent calibration and maintenance

13. Can be combined with pressure sensing components to achieve pressure signal feedback monitoring

14. Wear resistant design of internal components to extend the overall service life of the valve body

15. Original precision machining technology, with small long-term operation and adjustment errors

The TEL 2L80-050254-V1 pressure regulator is commonly used in TEL etching and thin film deposition equipment, and is the core valve body component for pressure stability control in the process gas supply circuit.

TEL 2L80-050254-V1 压力调节器   产品展示

nikon_4s019-369_opt-com1_w_4s008-266-2_x6epbody_pcb_board.jpg

视频展示


中文产品

ICS TRIPLEX T8461C 数字量输入模块
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EMERSON 1C31179G02 控制器模块

英文产品

UAC389AE02 HIEE300888R0002 Control card
DSBB110A 57330001-Y Control card
DSBC172 57310001-KD Control card

40PA59-55-TEFC-S193X735ACG01067-10098-0000
40PA58-53-TEFC-SPRD-SC30000Z-410AF00
40PA57-36-37-TENV-SSS2000MD7-RC6ES5306-7LA11
40PA56-55-TEFC-GSS2000MD4-10153575-00001-C
40PA54-36-37-TEFC-S51350-60SH845GV
3RX1240-0AS00S20660-CNS4116J79G2
3N63-100-3PS-3303I-E4116J79-G02

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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