1.产 品 资 料 介 绍：
NIKON 4S015-084继电器控制卡 产品英文介绍
The NIKON 4S015-084 relay control card is a specialized relay board for Nikon lithography machines, responsible for controlling the on/off of machine circuits to ensure the stability of equipment timing and safety circuits
Product Features
Multi channel relay output realizes multi-channel circuit switch control
Real time feedback channel status signal for onboard bus monitoring
Compatible with Nikon lithography machine bus architecture for stable and reliable communication
Industrial precision board, resistant to clean workshop dust, operates for a long time
Equipped with overload protection to reduce the risk of damage to the board and circuit
Product application areas
Used in conjunction with Nikon semiconductor lithography equipment
Wafer lithography equipment safety circuit control unit
Vacuum valve on/off control of lithography machine
Photolithography cavity gas path solenoid valve control component
Control of switch signals for wafer transfer mechanism
Timing control of auxiliary circuit in exposure system
Lithography machine cabinet IO switch output unit
Signal control of semiconductor lithography process equipment
Precision optical semiconductor equipment circuit monitoring
Repair and replacement of spare parts for semiconductor lithography machines
Product Specifications
Compatible with Nikon NSR series lithography machines
Function: Multi channel relay switch output bus status monitoring
Applicable scenarios: Continuous production operations in semiconductor cleanrooms
NIKON 4S015-084 relay control card is a core switch control spare part for photolithography equipment, used for semiconductor machine maintenance and replacement
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
