Azbil SPG0ZT13RZS000RL 电容隔膜真空计
1.产 品 资 料 介 绍：
Azbil SPG0ZT13RZS000RL 电容隔膜真空计 产品英文介绍
The Azbil SPG0ZT13RZS000RL capacitive diaphragm vacuum gauge relies on a single crystal sapphire pressure sensing film, which is resistant to high temperature and corrosion, and can achieve high-precision pressure monitoring in low vacuum ranges. It is commonly used for pressure closed-loop control in precision vacuum processes.
Product application areas
1. Vacuum monitoring of semiconductor ALD atomic layer deposition process
2. Pressure measurement and control of semiconductor CVD chemical vapor deposition chamber
3. Vacuum environment monitoring of semiconductor PVD sputtering coating
4. Vacuum pressure collection for semiconductor dry etching process
5. Vacuum freeze-drying equipment chamber pressure detection
6. Optical coating and vacuum evaporation film preparation equipment
7. Precision vacuum chamber pressure measurement in research laboratories
8. Pressure control of special material heat treatment vacuum furnace
9. Vacuum injection and baking process for lithium batteries
10. Analytical instruments, mass spectrometry equipment, vacuum pressure monitoring
Product Specifications
1. Measurement range: 13Pa full range, suitable for low vacuum fine measurement scenarios
2. Pressure sensing material: single crystal sapphire diaphragm, strong corrosion resistance, resistant to process deposits
3. Measurement principle: Capacitive detection, with excellent measurement repeatability and linearity
The Azbil SPG0ZT13RZS000RL vacuum gauge, with its stable zero point characteristics and high temperature resistance, can cope with various harsh vacuum processes, ensuring equipment process stability and product yield.
Azbil SPG0ZT13RZS000RL 电容隔膜真空计 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
