1.产 品 资 料 介 绍：
Lam 666-045257-403光纤温度转换器 产品英文介绍
The Lam 666-045257-403 fiber optic temperature converter is a photoelectric conversion unit that is compatible with the Panlin etching equipment. It receives the temperature signal of the cavity collected by the fiber optic sensor, converts the optical signal into a standard electrical signal, and sends it to the equipment main control to complete non-contact temperature measurement of the plasma cavity.
Product application areas
1. Temperature monitoring of semiconductor dry etching chamber wafer surface
2. ICP plasma etching chamber inner wall temperature acquisition and conversion
3. Real time temperature closed-loop control of dielectric layer etching process
4. Temperature measurement in high temperature environment of high aspect ratio etching chamber
5. Conversion of RF cavity temperature signal for semiconductor etching machine
6. Temperature feedback collection for wafer plasma processing technology
7. Replacement and maintenance of spare parts for Panlin Semiconductor etching equipment
8. Thermal stability monitoring of semiconductor cavities
9. Fiber optic temperature measurement signal conversion for plasma cleaning equipment
10. Temperature detection of front-end process cavity in chip manufacturing
Product Specifications
1. Signal conversion: Fiber optic signals are converted into industrial standard electrical signals for output
2. Anti interference characteristics: not affected by plasma RF electric field interference, suitable for strong electromagnetic cavities
3. Compatible equipment: LAM series etched cavity fiber optic temperature sensing system dedicated
The Lam 666-045257-403 fiber optic temperature converter can stably convert temperature signals in strong plasma interference environments, accurately feedback temperature changes inside the cavity, ensure uniformity of wafer etching processes, and reduce process anomalies.
Lam 666-045257-403光纤温度转换器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
