1.产 品 资 料 介 绍：
RMI S-10S02CE光纤测温传感探头 产品英文介绍
The RMI S-10S02CE fiber optic temperature sensing probe is a specialized fiber optic temperature sensing probe for semiconductor plasma chambers. It collects temperature optical signals from the surface of wafers and the inner walls of the chamber, and is used in conjunction with a fiber optic temperature converter to achieve non-contact temperature acquisition without interference from RF plasma electric fields.
Product application areas
1. Surface temperature acquisition of semiconductor etching chamber wafer
2. ICP plasma process chamber inner wall temperature measurement
3. Real time temperature sensing detection in dielectric etching process
4. Temperature monitoring of thin film deposition equipment chamber
5. Temperature acquisition of semiconductor plasma cleaning machine
6. Spare parts for fiber optic temperature measurement system of Panlin etching equipment
7. Closed loop temperature control signal pickup for wafer processing technology
8. High electromagnetic interference vacuum chamber temperature detection
9. Advanced packaging plasma process temperature monitoring
10. Replacement of optical temperature sensing for semiconductor equipment
Product Specifications
1. Sensing principle: Fluorescence fiber temperature measurement, stable acquisition of optical signals in strong RF environment
2. Structural characteristics: Small probe structure, suitable for installation positions with narrow cavities
3. Working condition advantages: no metal induction components, anti plasma RF interference
The RMI S-10S02CE fiber optic temperature sensing probe can stably pick up temperature optical signals in strong electromagnetic plasma environments, ensuring temperature consistency in wafer processes and reducing process scrap caused by temperature anomalies.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
