KLA-Tencor 710-650204-20驱动板
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-650204-20 驱动板是一款用于精密运动控制系统的关键模块，主要集成在 KLA Tencor 的 2132 晶圆缺陷检测设备中。该设备广泛应用于半导体制造领域，用于识别晶圆表面和层间的微小缺陷。
产品应用领域
晶圆缺陷检测系统（Wafer Defect Inspection）
驱动板负责控制 Y 轴线性移动组件，实现晶圆在检测平台上的精准定位和平稳移动。这一功能对确保扫描成像精度和缺陷识别准确性至关重要。图像采集与扫描平台控制
该模块与图像采集系统配合工作，通过驱动精密电机移动晶圆，实现高分辨率图像的多角度采集，是系统中图像形成与分析的基础环节。自动化检测系统集成
在复杂的自动化检测流水线中，该驱动板作为子系统的核心驱动控制单元，协同其他控制板（如对焦板、Z轴控制板）完成系统级的同步操作。高精度定位控制系统
驱动板搭载高速数据处理单元和精密反馈控制机制，用于处理位移传感器或编码器的实时信号，支持微米级别的定位控制。生产设备维护与替换组件
模块化设计便于设备维护和更换，有助于提升整机系统的可维修性，减少停机时间，提高生产效率。
技术特点
型号：710-650204-20
类型：Y轴 Flex 驱动控制板
功能：高精度电机驱动，运动路径控制，系统状态反馈
应用设备：KLA Tencor 2132 系列 200mm 晶圆检测机
接口：通常集成标准伺服驱动器通信协议，支持高速数据链路与主控系统通信
英文资料：
The KLA Tencor 710-650204-20 driver board is a key module for precision motion control systems, mainly integrated into KLA Tencor's 2132 wafer defect detection equipment. This device is widely used in the field of semiconductor manufacturing to identify small defects on the surface and between layers of wafers.
Product application areas
Wafer Defect Inspection System
The driver board is responsible for controlling the Y-axis linear moving component, achieving precise positioning and smooth movement of the wafer on the inspection platform. This function is crucial for ensuring the accuracy of scanning imaging and defect recognition.
Image acquisition and scanning platform control
This module works in conjunction with the image acquisition system, driving a precision motor to move the wafer and achieve multi angle acquisition of high-resolution images. It is the fundamental link in image formation and analysis in the system.
Integration of automated detection system
In a complex automated inspection assembly line, this drive board serves as the core drive control unit of the subsystem, collaborating with other control boards (such as the focusing board and Z-axis control board) to complete system level synchronization operations.
High precision positioning control system
The drive board is equipped with a high-speed data processing unit and a precision feedback control mechanism, used to process real-time signals from displacement sensors or encoders, and supports micrometer level positioning control.
Production equipment maintenance and replacement of components
Modular design facilitates equipment maintenance and replacement, helps improve the maintainability of the entire system, reduce downtime, and enhance production efficiency.
FEATURES
Model: 710-650204-20
Type: Y-axis Flex Drive Control Board
Function: High precision motor drive, motion path control, system status feedback
Application equipment: KLA Tencor 2132 series 200mm wafer inspection machine
Interface: Typically integrated with standard servo drive communication protocols, supporting high-speed data link communication with the main control system
2.产 品 展 示
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