KLA Tencor 073-404145-00电路板

KLA-Tencor  073-404145-00电路板

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 073-404145-00 电路板是一种专用于半导体晶圆检测设备的关键控制组件，广泛应用于KLA的多个检测平台中，尤其是在电子束检测和光学检测设备上。以下是其主要的产品应用领域：

KLA Tencor 073-404145-00 电路板的应用领域

1. 晶圆缺陷检测系统

• 用于高精度电子束（e-beam）或光学晶圆检测系统中，处理来自探测器或扫描机构的信号。

• 支持对晶圆表面微小缺陷、粒子污染、图案异常等的识别与分析。

• 典型应用机型包括 KLA eS31 系列电子束检测设备。

2. 多层图案对准检测

• 在 KLA 5100 / 5200 系列等图案对准检测设备中，该电路板起到图像数据采集与同步控制作用。

• 对于先进封装（如2.5D、3D IC）制造过程中的多层图案叠层检测至关重要。

3. 半导体制程控制设备

• 用于工艺质量监控系统，确保晶圆在不同制程阶段中的稳定性与一致性。

• 对应检测结果被用于实时工艺反馈和良率提升策略中。

4. 设备内部信号分配与处理

• 扮演系统通信、控制命令传输与状态反馈的枢纽，连接主控制器与执行单元、传感器、致动器等。

• 保证设备稳定运行和精确响应。

适用环境与特点

• 环境：洁净室等级的半导体制造厂，24/7 连续运行环境。

• 特点：高稳定性、模块化、抗干扰设计，支持多通道高频信号处理。

英文资料：

The KLA Tencor 073-404145-00 circuit board is a key control component specifically designed for semiconductor wafer inspection equipment, widely used in multiple inspection platforms of KLA, especially in electron beam inspection and optical inspection equipment. The following are its main product application areas:

Application areas of KLA Tencor 073-404145-00 circuit board

1. Wafer defect detection system

Used in high-precision electron beam (e-beam) or optical wafer inspection systems to process signals from detectors or scanning mechanisms.

Support the recognition and analysis of small defects, particle contamination, pattern anomalies, etc. on the surface of wafers.

Typical application models include the KLA eS31 series electron beam detection equipment.

2. Multi layer pattern alignment detection

In KLA 5100/5200 series pattern alignment detection equipment, this circuit board plays a role in image data acquisition and synchronization control.

Multi layer pattern stacking detection is crucial for advanced packaging (such as 2.5D, 3D IC) manufacturing processes.

3. Semiconductor process control equipment

Used for process quality monitoring systems to ensure the stability and consistency of wafers at different stages of the manufacturing process.

The corresponding detection results are used in real-time process feedback and yield improvement strategies.

4. Internal signal distribution and processing of equipment

Play the role of a hub for system communication, control command transmission, and status feedback, connecting the main controller with execution units, sensors, actuators, etc.

Ensure stable operation and precise response of the equipment.

Applicable environment and characteristics

Environment: A semiconductor manufacturing plant with a cleanroom rating and a 24/7 continuous operating environment.

Features: High stability, modular, anti-interference design, supporting multi-channel high-frequency signal processing.

2.产      品      展      示      

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