KLA Tencor 720-06888-001焦点控制板机箱

KLA-Tencor  720-06888-001焦点控制板机箱

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 720-06888-001 焦点控制板机箱（Focus Control Board Chassis）是用于KLA Tencor CD-SEM（临界尺寸扫描电子显微镜）系列设备中的关键部件，主要用于聚焦系统的控制和稳定。

主要功能

• 焦点控制：用于调节电子束焦点，确保在晶圆表面实现高分辨率、高精度的成像与测量。

• 模块集成：该机箱集成焦点控制板，与图像处理、电压调节等模块协同，实现电子束的动态优化控制。

应用领域

1. 半导体制造
   应用于晶圆加工过程中的临界尺寸（CD）测量及缺陷检测，有助于工艺过程控制（Process Control）和良率提升。

2. 研发与质量控制
   在工艺开发与质量评估中，提供精确的聚焦控制，保证扫描成像质量，是CD-SEM系统不可或缺的组成部分。

技术信息

• 部件号：720-06888-001（早期版本为720-06888-000）

• 版本信息：常见为 REV: A

• 适用机型：常用于 KLA Tencor 8100XP、8100XPR、8250 等系列CD-SEM设备中

英文资料：

The KLA Tencor 720-06888-001 Focus Control Board Chassis is a key component used in the KLA Tencor CD-SEM (Critical Dimension Scanning Electron Microscope) series equipment, primarily for controlling and stabilizing the focusing system.

major function 

Focus control: used to adjust the focus of the electron beam, ensuring high-resolution and high-precision imaging and measurement on the wafer surface.

Module integration: This chassis integrates a focus control board, which works in conjunction with image processing, voltage regulation, and other modules to achieve dynamic optimization control of the electron beam.

application area 

Semiconductor Manufacturing

The critical dimension (CD) measurement and defect detection applied in wafer processing contribute to process control and yield improvement.

Research and Quality Control

Providing precise focus control and ensuring scanning imaging quality is an essential component of CD-SEM systems in process development and quality assessment.

Technical Information

Part number: 720-06888-001 (early versions were 720-06888-000)

Version information: commonly known as REV: A

Applicable models: commonly used in KLA Tencor 8100XP, 8100XPR, 8250 and other series CD-SEM equipment

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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