KLA Tencor 710-611487-001单轴控制器

KLA-Tencor  710-611487-001单轴控制器

1.产 品 资 料 介 绍：

中文资料：

KLA Tencor 710-611487-001 单轴控制器

产品概述

KLA Tencor 710-611487-001 是一款专用于半导体检测设备的单轴控制器模块，常用于其电子束扫描系统（如 eS20 系列）。该模块主要负责为图像计算单元和相关控制电路提供稳定的直流电源，保障设备运行的稳定性和精度。

主要功能

• 电源转换与稳定输出
  将交流电源转换为稳定的直流电压，保证图像处理和运动控制单元的正常工作。

• 信号调度与管理
  负责控制信号的接收、传输和协调，确保系统各部分同步运行。

• 系统集成
  与其他控制模块和传感器紧密配合，实现半导体检测设备的高效控制。

应用领域

• 半导体制造中的晶圆缺陷检测

• 工艺研发及质量控制环节的高精度检测设备

技术规格

• 部件号：710-611487-001

• 制造商：KLA Tencor

• 版本：常见版本为 Rev. A

• 适用设备：电子束晶圆检测系统，如 eS20 系列

英文资料：

KLA Tencor 710-611487-001 Single Axis Controller

product overview

KLA Tencor 710-611487-001 is a single axis controller module specifically designed for semiconductor testing equipment, commonly used in its electron beam scanning systems (such as the eS20 series). This module is mainly responsible for providing stable DC power supply for the image computing unit and related control circuits, ensuring the stability and accuracy of equipment operation.

major function 

Power conversion and stable output

Convert AC power to stable DC voltage to ensure the normal operation of image processing and motion control units.

Signal scheduling and management

Responsible for controlling the reception, transmission, and coordination of signals to ensure synchronous operation of all parts of the system.

system integration

Closely cooperate with other control modules and sensors to achieve efficient control of semiconductor detection equipment.

application area 

Wafer defect detection in semiconductor manufacturing

High precision testing equipment for process research and quality control

technical specifications

Part number: 710-611487-001

Manufacturer: KLA Tencor

Version: The common version is Rev. A

Applicable equipment: Electron beam wafer inspection system, such as eS20 series

2.产      品      展      示      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218