KLA-Tencor 710-603180-003接口板
1.产 品 资 料 介 绍:
中文资料:
KLA Tencor 710-603180-003 接口板
(Digital Deflection Generator Interface Board)
产品简介
KLA Tencor 710-603180-003 是一款用于电子束(e-beam)检测设备中的数字偏转发生器接口板。该板卡是系统中的关键组件之一,主要作用是为电子束的偏转控制系统提供精确的电信号,以便实现高分辨率图像采集和表面缺陷检测。
主要功能
控制电子束在晶圆表面上的精密移动
与电子束控制系统(Digital Deflection Generator)直接通信
支持高频、高精度信号输出,确保检测准确性
协同图像处理系统优化整体检测质量
应用领域
晶圆缺陷检测设备
半导体生产线质量控制系统
精密扫描成像系统
研发实验室的工艺评估与调试平台
技术信息(概述)
型号/部件号:710-603180-003
类型:接口板组件(Interface Board Assembly)
制造商:KLA Tencor
常见设备:应用于 KLA 的电子束检测设备,如 eS 系列或 e-Beam 相关系统
英文资料:
KLA Tencor 710-603180-003 Interface Board
(Digital Deflection Generator Interface Board)
Product Introduction
KLA Tencor 710-603180-003 is a digital deflection generator interface board used in electron beam (e-beam) detection equipment. This board is one of the key components in the system, mainly used to provide accurate electrical signals for the deflection control system of the electron beam, in order to achieve high-resolution image acquisition and surface defect detection.
major function
Control the precise movement of the electron beam on the wafer surface
Direct communication with the Digital Reflection Generator system for electron beam control
Support high-frequency and high-precision signal output to ensure detection accuracy
Optimizing the overall detection quality of collaborative image processing system
application area
Wafer defect detection equipment
Quality Control System for Semiconductor Production Line
Precision scanning imaging system
Process evaluation and debugging platform for R&D laboratory
Technical Information (Overview)
Model/Part Number: 710-603180-003
Type: Interface Board Assembly
Manufacturer: KLA Tencor
Common equipment: Electron beam detection equipment applied to KLA, such as eS series or e-beam related systems
2.产 品 展 示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218